太陽能常用單詞中英對照標準

1、B 上応天需戯電子育B閣司SHANGHAI TIANMA M I CR OELE CT RO N I C sQ/S D.上海天馬微電子有限公司企業(yè)標準Q/S0001-2007TFT工藝流程、材料、設備、生產(chǎn)常用中英文標準名稱版號：1.0總頁數(shù):23制定部門：制造部生效日期：2007年4月28日擬制：方永學2007-4-3審核：向傳義2007-4-3標準化：吳乃亮2007-4-25會簽：顏建軍朱希玲2007-4-20蔡明宏2007-4-24凌志華2007-4-3批準：安德浩2007-4-242007-04發(fā)布2007-04實施上海天馬微電子有限公司發(fā)布TFT工藝流程、材料、設備、生產(chǎn)常用中英文標

2、準名稱Q/S0001-2007第 2 頁共 23 頁更改狀態(tài)更改內容更改人更改日期一.TFT工藝流程中英文標準名稱Array Process Flow陣列段工藝流程In put 投料Un pack ing拆包裝In itial clea n預備清洗Particle cou nt塵埃粒子測試Gate柵電極層Clea n before depo成膜前清洗Gate (Mo/Al alloy ) Film depo柵電極成膜RS meter電阻測量Macro In specti on宏觀檢查Clea n before PR涂膠前清洗Pre bake預烘PR Coati ng光刻膠涂布PR vacuum

3、 dry(VCD)光刻膠低壓干燥PR soft bake前烘Expose曝光Titler Expose/Edge Expose打標/邊緣曝光Develop顯影PR hard bake堅膜ADI顯影后自動光學檢查Mic/Mac In spection宏微觀檢查CD after develop顯影后關鍵尺寸檢查Total pitch長寸測量Gate Wet etch柵電極濕刻Con tact an gle接觸角測量PR strip光刻膠剝離CD after etch刻蝕后關鍵尺寸測量AEI刻蝕后自動光學檢查Micro/Macro In specti on宏微觀檢查Laser Repair激光修補A

4、ctive 層Clea n before depo成膜前清洗Active film depoActive成膜AOI自動光學檢查Macro In specti on宏觀檢查Thick ness Measureme nt厚度測量Clea n before PR涂膠前清洗Pre bake預烘PR Coati ng光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expose曝光Develop顯影PR hard bake堅膜ADI顯影后自動光學檢查Mic/Mac In spection宏微觀檢查Active film Dry etch & Ashi ngActive膜干刻與

5、灰化Thick ness Measureme nt厚度測量PR strip光刻膠剝離AEI刻蝕后自動光學檢查Mic/Macro In specti on宏微觀檢查S/D源/漏電極層Clea n before depo成膜前清洗S/D Mo film depo源/漏電極成膜RS meter電阻測量MACRO In spection宏觀檢查Clea n before PR涂膠前清洗Pre bake預烘PR Coati ng光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expose曝光Edge expose邊緣曝光Develop顯影PR hard bake堅膜ADI顯

6、影后自動光學檢查MIC/MAC In spection宏微觀檢查CD after develop顯影后關鍵尺寸檢查Hard bake by ove n烘爐堅膜S/D Mo Wet etch源電極/漏電極濕刻n+ a-Si Dry etchn+高摻雜膜干刻PR strip光刻膠剝離Thick ness Measureme nt厚度測量CD after etch刻蝕后關鍵尺寸測量AEI刻蝕后自動光學檢查Micro/Macro In specti on宏微觀檢查Clean before O/S test短路/開路測試前清洗Ope n/Short Test短路/開路測試Passivati on保護層C

7、lea n before depo成膜前清洗Pass n film depo保護膜成膜AOI自動光學檢查MACRO In spection宏觀檢查Thick ness Measureme nt厚度測量Clea n before PR涂膠前清洗Pre bake預烘PR Coati ng光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expose曝光Edge expose邊緣曝光Develop顯影PR hard bake堅膜ADI顯影后自動光學檢查Micro/Macro In specti on宏微觀檢查Si nX Dry etch & ASHING氮化硅干刻與灰化P

8、R strip光刻膠剝離AEI刻蝕后自動光學檢查Micro/Macro In specti on宏微觀檢查ITOITO層Clea n before PR成膜前清洗a-ITO film depoITO成膜RS meter電阻測試Ann eal煺火Macro In specti on宏觀檢查Clea n before PR涂膠前清洗Pre bake預烘PR Coati ng光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expose曝光Develop顯影PR hard bake堅膜ADI顯影后自動光學檢查Micro/Macro In specti on宏微觀檢查ITO

9、 film etchITO膜濕刻PR strip光刻膠剝離AEI刻蝕后自動光學檢查Micro/Macro In specti on宏微觀檢查Final E/T最終電測Ann eal煺火Array test陣列測試Array repair陣列修補TEG testTEG測試Sort分級Cell Process flow制盒段工藝流程CF In put 彩膜投料CF In itial Clea n彩膜預備清洗CF AOI彩膜自動光學檢查CF Sort彩膜分級PI配向膜Clea n before PI配向膜涂布前清洗PI Pri nt配向膜涂布Pre-cure預固化PI In specti on配向膜

10、檢查PI Thick ness配向膜厚度測量Measurement Main-cure固化PI rework配向膜返工ODFCF& TFT Matchi ngCF&TFT匹配Rubb ing配向摩擦Rubb ing In specti on摩擦檢查Loader & Un loader上料機/下料機Buffer緩沖器CST Buffer工裝欄緩沖器Rotatio n/Cooli ng Un it旋轉/冷卻單元Turn Alig n Un it旋轉/對位單元Turn Over Un it翻轉單元After Rubb ing Clea ner摩擦后清洗Spacer Spray襯墊球散布Spacer

11、Coun ter襯墊球計數(shù)Spacer rework襯墊球返工Spacer Cure襯墊球附著固化Short Dispe nse導電膠涂布TIANMATFT工藝流程、材料、設備、生產(chǎn)常用中英文標準名稱Q/S0001-2007第 6 頁共 23 頁Seala nt Dispe nse邊框膠涂布Seal In specti on邊框膠檢查LC Dispe nse液晶滴下Vacuum Assembly真空貼合UV Cure紫外線固化Mis-alig nment check錯位檢查Seal Ove n邊框膠熱固化Eye In specti on目視檢查Cell gap Measureme nt盒厚測試

12、Cutti ng切割1/4(1/6)Sheet Cutti ng,1/4(1/6)切割Stick Cutti ng,切條Cell Cutt ing切粒Visual TestVisual 測試ECPEdge Gri nd磨邊Dipp ing clea n浸泡式清洗Clea n before Pol貼片前清洗Pol Attach貼片Pol In specti on貼片檢查Pol rework貼片返工Auto ClaveAuto Clave消泡LaserLaser Trimmer激光切線TrimmerTest測試Gross Test終檢Repair修補Bin sorter分級OQC Test出貨檢查

13、Store貨棧TFT工藝流程、材料、設備、生產(chǎn)常用中英文標準名稱第7頁共23頁Module Process Flow模塊段工藝流程COGPad clea ning端子清洗IC BondingIC邦定Microscope In specti on鏡檢|-t U-、（/ *、/* 丄人AdhesAtest自粘接力學測檢查FOGACF Attach ingACF粘貼FOG BondingFOG邦定Microscope In specti on鏡檢Peeli ng stre ngth test拉力測試ET test1電測1IC or FPC Repair修補UV glue seali ng封膠FPC

14、rei nforceme nt補強UV glue curi ngUV膠固化Assembly組裝ET test2電測2an ti-ultraviolet tape attachi ng遮光膠帶粘貼protected tape attachi ng保護膠帶粘貼Backlight assembly背光源組裝Backlight solderi ng背光源焊接Touch panel assembly觸摸屏組裝Final ET test最終電測Rework返工Agi ng老化QC testQC檢驗Code printing噴碼Pack ing包裝OQC Test岀貨檢驗Fini shed good shi

15、pme nt合格品岀貨CIM name集成控制系統(tǒng)名稱CIM計算機集成制造 系統(tǒng)CIM System計算機集成制造系統(tǒng)Man ufacturi ng Executi on System(MES)制造執(zhí)行系統(tǒng)（MESPreve ntive Maintenance System(PMS)設備預防保養(yǎng)系統(tǒng)（PMSStatistical Process Con trol(SPC)統(tǒng)計過程管理（SPCEquipme nt Automati on Program(EAP)設備自動化（EAP）Report報表Engin eeri ng Data An alysis(EDA)工程數(shù)據(jù)分析（EDAFin ish

16、ed Good Man ageme nt System(FGMS)成品管理系統(tǒng)（FGMSProduct產(chǎn)品Glass玻璃基板Panel面板Process Flow工藝流程Operati on操作EDC工程數(shù)據(jù)收集Equipme nt設備Chamber腔體Un it單體Sub Un it副單體Port端口OIC (Operator In terface Clie nt)操作者界面EDB工程數(shù)據(jù)庫FGMS成品管理系統(tǒng)Dispatcher派貨Create建立Start下線Scrap報廢Un scrap取消保廢Complete完成Ship出貨Un ship取消出貨Receive收料Track In入賬

17、Track Out出賬Wait等待Hold滯留Release釋放Rework返工Vehicle搬運車Robot:機械手AGV (Automatic Guided Vehicle)自動搬運車MGV (Man ual Guided Vehicle)人工搬運車Clean lifter凈化電梯LIM (Linear In duction Motor) Carrier線性感應馬達傳送載具OHS (Overhead Han dli ng System)天車搬送系統(tǒng)Stocker (clea n depot)工裝籃存放架Battery電池Bay作業(yè)區(qū)In ter-bay作業(yè)區(qū)和作業(yè)區(qū)之間In tra-bay

18、:作業(yè)區(qū)之內Bumper減震緩沖器Charger充電器Con troller控制器Conveyor傳送帶Crane吊車（在Stocker 內）FFU (Fa n Filter Unit)風扇過濾器Host主機I/O (Input / Output)輸入/輸出IR (In fra-Red)紅外線IRIF(I nfra-Red In terface)紅外接口Load:上料Un load下料Magn etic tape磁條（AGV路徑所使用的磁條）Retrieve檢索RTM (Rotary Tra nsfer Machi ne)旋轉傳送機構SCARA armAGV傳送臂Reset重新設定Tra ns

19、portatio n傳輸Recipe工藝參數(shù)的組合Stock out將工裝籃取出貨棧Request要求,請求Tra nsfer傳送,運送In structio n:命令,指令Select選擇Can cel取消Operati on作業(yè),操作Support支援,支持Process工藝Start開始Batch批量Lot批（指生產(chǎn)線的在制品或產(chǎn)品控制 單位）ID (Ide ntity)識別碼(如 Lot ID or Chip ID)Q/S0001-2007第10頁共23頁Sheet片（Array區(qū)玻璃基版計數(shù)單位）In specti on檢驗Defect缺陷Hold滯留Release釋放Equipme

20、 nt設備（簡稱為EQP）Tool工具,機臺WIP (Work In Process)在制品（工藝在制品）Maintenance維修保養(yǎng)Cassette工裝籃（陣列段）,卡匣（制盒段及模 塊段）Empty空的Reserve預備Report報告Rework返工Log on登錄，入系統(tǒng)Log off注銷登錄，離開系統(tǒng)Note批注Un pack ing line拆包線Un packer拆包機Glass con veyor玻璃傳送帶In itial Clea ner預清洗Un loader下料機Cassette Manual Guide Vehicle (MGV)工裝籃人工搬運車Array Casse

21、tteArray工裝籃ODF CassetteODF工裝籃Automated Material Handling System(AMHS)自動物料搬運系統(tǒng)Clea n Stocker(STK)潔凈工裝籃存放架（STK）Overhead Han dli ng System (OHS)天車搬送系統(tǒng)（OHSMaterial Con trol System (MCS)物料控制系統(tǒng)（MCSClean Robot:潔凈機械手Loader/ Un loader上/下料機Sorter分片機TFT二.TFT材料中英文標準名稱類型TypeMaterials n ame材料名稱玻璃GlassGlass玻璃基板Col

22、or filter彩色濾光膜Bare glass白玻璃基板LCD Panel液晶面板靶材TargetAINd/AI Target鋁釹/鋁靶材MoNb/Mo Target鉬鈮/鉬靶材ITO TargetITO靶材化學液體ChemicalAl Etcha ntAl蝕刻液ITO Etcha ntITO蝕刻液HNO3硝酸CH3COOH乙酸Developer顯影液Stripper剝離液MEA單乙醇胺Photo Resist光刻膠Orga nic Photo Resist有機膜用光刻膠Thinner稀釋劑NMPN-甲基-2-吡咯烷酮HF氫氟酸Acet one丙酮IPA異丙醇Etha nol酒精輔助器材Su

23、b materialPhoto Mask光罩APR PlateAPR版Rubbi ng Cloth摩擦絨布Adhesive Tape雙面膠布Probe frame for array tester陣列電測架E/T Frame電測用探測架Cell ET Probe Unit屏電測用探測頭Open/Short tester and prober開路、短路電測用探測頭Tefl on Tape特氟龍帶Silic on rubber硅膠皮Wiper Tape無塵卷布高純氣體High purity gasNF3三氟化氮SiH4硅烷SF6六氟化硫NH3氨氣Cl2氯氣HCL氯化氫CHF3三氟甲烷PH3磷烷CF

24、4四氟甲烷N2氮氣02氧氣H2氫氣Ar氬氣He氦氣液晶LCLC液晶材料膠膜FilmPolarizer偏光片Diffuser散光膜涂料DopePI聚酰亞胺樹脂Resi nSeala nt邊框膠UV glueUV膠ACF各向異性導電膜Con ductive Spacer導電襯墊球Spacer used in Seala nt邊框膠內襯墊球Spacer used in Cell（ White）盒內襯墊球（白）Spacer used in Cell（ Black）盒內襯墊球（黑）元器件PartsBack Light Un it背光源In tegrated circuit/Driver IC集成電路/驅

25、動ICPCB印刷電路板FPC柔性印刷線路板Module Frame模塊外框Touch Pan el/Touch film觸摸屏/觸摸膜RCL阻容器件焊接材料Solderi ngFLUX助焊劑SOLDER CREAM焊錫/焊接劑materialTFT三.TFT設備中英文標準名稱En glish n ame中文名稱PHOTO曝光Exposer曝光機Coater Developer陳列黃光制程清洗機-涂布機-顯影機long size measuring and critical dimension measuri ng multiple equipme nt測長儀和線寬測量儀Titler& Edge

26、 Exposer打標機和邊緣曝光復合機Edge Exposer邊緣曝光機AFM原子力顯微鏡FIB聚焦離了束糸統(tǒng)FE-SEM場發(fā)射掃描電子顯微鏡UV MeterUV照度計EXCIMER UV準分子紫外清洗機loni zer Bar除靜電棒Fire Ext in guisher滅火器Photo loni zer軟X射線靜電消除器PVD&WET濺射&濕式PVD(Multi-chamber type sputteri ng system)磁控濺射成膜機Particle cou nter塵埃粒子測量儀Ultras onic Clea ner超聲波清洗機Stripper脫膜機Con tact An gle

27、 An alyzer接觸角測量儀RS Meter(4poi nt Probe)四探針儀Cassette Clea ner工裝籃清洗機In itial Clea ner預備清洗機Pre CVD clea ner成膜前清洗機HF Clea ner before S/DS/D成膜前帶HF清洗機Liquid Particle Coun ter液體內塵埃粒子測量儀CCSS中央化學品供應系統(tǒng)Ann eal Oven退火爐Hard Bake Ove n后烘爐Film Tester薄膜附著力測試儀Etcha nt Concen trati on Man ageme ntSystem刻蝕液濃度管理系統(tǒng)DMS顯影

28、液濃度管理系統(tǒng)DRS顯影液溶劑回收系統(tǒng)RMS剝離液濃度管理系統(tǒng)Wet Etcher濕刻機4.5G-Macro Review System4.5G宏觀檢查機4.5G-Mic/Mac Review System4.5G宏觀、微觀檢查機RGA(Residual Gas An alyzer)殘余氣體分析儀PECVD化學氣相沉Hot N2 Tran sfer System熱N2供應系統(tǒng)PECVD等離子增強化學氣相淀積設備Special Gas Supply & Mon itor System特種氣體供應和監(jiān)視管理系統(tǒng)積Temperature Recorder溫度記錄儀Gas Scrubber for P

29、ECVDPECVD用尾氣處理裝置Full Automatic Spectroscopic Ellipsometer for Flat Panel Display平板顯示用全自動橢圓偏振光譜儀Clea n Crane潔凈室起重機設備Spectroscope Reflectometer平板顯示用全自動分光反射光譜儀He Leak Detector氦氣檢漏儀DRY干刻Dry Pump for CVD化學氣相沉積設備用真空泵Dry Pump for PVD物理氣相沉積設備用真空泵EPD for Dry Etchi ng干刻終點偵測器Dry pump for Dry Etch ing干刻機設備用真空泵D

30、ry Etch in g/Ashi ng System干刻灰化一體機Profiler System段差量測機Chiller for Dry Etchi ng干刻機輔助設備冷卻器Local Scrubber System for Dry Etch ing干刻用廢氣處理設備CELL制盒Rubb ing Line摩擦線Before PI clea nerPI前清洗機Cassette BF工裝籃緩沖器PI Prin terPI涂布機Pre-Cure預固化爐Main-Cure主固化爐Loader/ Un loader上下料機APR clea nerAPR板清洗機Rubb ing In specti on

31、摩擦檢查機After Rubb ing Clea ner摩擦后清洗機ODF SystemODF相關設備Seal Dispe nser邊框膠涂布機Short Dispe nser導電膠涂布機Seal De-bubbli ng mach ine邊框膠脫泡機UV cure紫外線固化機Spacer Cure Oven襯墊球固化爐Cooli ng /Rotati on Un it冷卻/旋轉裝置Seal Cure Ove n邊框膠固化爐LC dispe nser液晶滴下機LC de-bubbli ng液晶脫泡機Vacuum Assembly真空貼合系統(tǒng)Mis-alig n Checker對位檢查機Visu

32、al In specti on目視檢查機ODF In li ne tra nsfer and line con trol blockODF聯(lián)線傳輸和軟件控制系統(tǒng)Loader(3port)上料機Un loader(3port)下料機Cassette Buffer卡匣緩沖器Turn Align Buffer旋轉對位緩沖器Pairi ng/NG Buffer配對/不良制品緩沖器Spacer NG Buffer襯墊球散布不良制品緩沖器Turn Over Alig n翻轉對位器TIANMATFT工藝流程、材料、設備、生產(chǎn)常用中英文標準名稱Q/S0001-2007第 15頁共 23 頁UV Mask st

33、ockUV Mask存儲柜Buffer after UV cure紫外線固化后緩沖器Cooling Buffer冷卻緩沖器Spacer US Clea ner襯墊球超聲波清洗機Spacer Remover(USC)襯墊球聚團去除裝置（超聲波清洗機）US Clea ner after seala nt dispe nsing邊框膠涂布后超聲波清洗機US Clea ner after short dispe nsing點膠后超聲波清洗機Master PLC主PLCCIM PCCIM PCSeal In specti on邊框涂布檢查機Cell Gap In specti on盒厚檢查機Dry Sp

34、acer Spray & Spacer cou nt干式散布機襯墊球計數(shù)器Auto Clave偏光片貼附后加壓消泡機Edge Grin der液晶面板磨邊機LCD Panel cleaning and Polarizer attach system液晶面板清洗和偏光板貼附機系統(tǒng)Panel Clea ner面板清洗機（用于液晶面板清洗和偏光板貼附機系統(tǒng)）Polarizer Attach Machi ne偏光板貼附機（用于液晶面板清洗和 偏光板貼附機系統(tǒng)）LCD Panel Polarizer Rework Mach ine液晶面板偏光片返工機Cell Cassette(3-10.4)3-10.4

35、Cell卡匣Sin gle head scriber單刀頭切割機LCD glass in-li ne Scriber液晶面板在線切割機Multi head Scriber多刀頭切割機MODULE模塊COG bonding mach ine自動COG邦定機COG Semi-automatic Bonding Machi ne半自動COG邦定機Aging test system老化測試系統(tǒng)Signal gen erator for LCD In specti onLCD檢查用信號發(fā)生器Auto Optical In specti on自動光學檢測儀Air Particle Cou nter空氣塵埃

36、粒子測量儀Backlight tester背光源色度亮度測量儀Projector投影儀Microscope顯微鏡loni zer blower離子風扇Surface resista nee test kit(點檢)表面電阻測量儀Charged Plate Mon itor平面帶電測試儀Static electricity voltage testi ng靜電電壓測量儀TEST測試ADI-AOI顯影后檢測AEI-AOI刻蝕后檢測CF-AOI彩色濾光片檢測Array Tester陣列電測機Open/Short tester and prober開路/短路檢測和探針系統(tǒng)ARRAY O/S probe

37、開路/短路探針系統(tǒng)TEG ProberTEG探針系統(tǒng)TIANMATFT工藝流程、材料、設備、生產(chǎn)常用中英文標準名稱Q/S0001-2007第 16頁共 23 頁TEG TesterTEG測試系統(tǒng)Probe Un it for TEGTEG測試用探針系統(tǒng)Array repair激光修補系統(tǒng)Array Probe frame陣列電測架Visual test probe un it目測用探針系統(tǒng)ET Probe un it2英寸電測用探針系統(tǒng)Microscope顯微鏡（Panel）Microscope and laser system帶激光的顯微鏡Barcode Reader條形碼閱讀器Fixed

38、2D Code Reader2維讀碼器系統(tǒng)（固定類型）Portable 2D Code Reader2維讀碼器系統(tǒng)（可移動類型）PI+Macro in specti on systemPI+Macro檢測系統(tǒng)Cell Gap Measure System盒厚測量系統(tǒng)Laser Trimmer激光切線系統(tǒng)Cell Laser Repair液晶盒激光修補系統(tǒng)Oscilloscope示波器Man ual probe手動探針系統(tǒng)Precisi on Parameter An alyzerTFT參數(shù)分析儀R&D研發(fā)Product Optical Quality Measureme nt System產(chǎn)品

39、光學質量檢測系統(tǒng)Optical Parameters Measureme nt System光學特性量測設備Circuit drawi ng0rcad電路圖編輯器P-spice An alog Simulatio nP-spice電路仿真器PCB ArtworkPCB線路圖編輯器3D Mecha ni cal Desig n Tool3D機械設計工具2D structure Desig n Tool2D結構設計工具Patter n Gen erator測試圖形發(fā)生器Resista nee Atte nuator電阻衰減器illum inance Colorimeter亮度色度計Spectrop

40、hotometer亮度色度光譜儀Color An alyzer色彩分析儀R,L,C Measureme ntR,L,C測試儀ESD Gun (EMI/EMS)table靜電槍臺UV TEST chamber紫外線測試箱Seal dispe nser邊框膠涂布機three axis Measureme nt Stage三軸量測平臺Pre-tilt an gle & cell gap measureme nt system傾斜角盒厚量測儀LC resistivity meter液晶電阻率測量儀Oscilloscope(A nalog)模擬示波器Thermo-hygrostat恒溫恒濕柜Therma

41、l Shock Chamber冷熱沖擊艙ESD Gun( EMI/EMS)靜電槍Liquid crystal in jecti on mach ine灌晶機Plasma clea ning machi ne等離子清洗機Simulatio n software of LCD Optical parametersLCD光學特性模擬軟件Layout editor for mask版圖設計軟件CIM集成控制CIM System-.Ma nufactur ing Execution System(MES) -.Preve ntive Mai ntenance System(PMS) -.Statisti

42、cal Process Con trol(SPC) -.Equipme nt Automati on Program(EAP) -.Report System-.Engineering Data Analysis(EDA)-.Fi ni shed Goods Man ageme nt System(FGMS) -.E ngin eeri ng Data Base(EDB)計算機集成制造系統(tǒng)-.制造執(zhí)行系統(tǒng)-.機臺預防保養(yǎng)系統(tǒng)-.統(tǒng)計制程管制-.設備自動化-.報表系統(tǒng)-.工程數(shù)據(jù)分析-.產(chǎn)成品管理系統(tǒng)-.工程數(shù)據(jù)庫Operator In terface Clie nt(OIC)操作者界面FAB

43、Mo nitori ng Clie nt(FMC)工廠監(jiān)控系統(tǒng)Dispatcher(DSP)任務分配系統(tǒng)Fault Detection and Classificatio n( FDC)缺陷檢查和分類系統(tǒng)Alarm Ma nageme nt System(AMS)機臺報警系統(tǒng)Real Time An alysis/M on itori ng System(RTAMS)缺陷管理的實時監(jiān)控/分析系統(tǒng)System Ma nageme nt System(SMS)系統(tǒng)管理系統(tǒng)AMHS 物料搬運Un pack ing line -.U n packer -.Glass con veyor -.In it

44、ial Clea ner -.U n loader拆包線-.拆包機-.玻璃傳送帶-.預清洗-.下料機Cassette Manual Guide Vehicle (MGV)工裝籃人工引導車Array CassetteArray工裝籃ODF CassetteODF工裝籃Automated Material Ha ndli ng System(AMHS) -.Clea n Stocker(STK)-.Overhead Handling System (OHS)-.Material Con trol System (MCS)自動物料搬運系統(tǒng)-.潔凈堆料機（STK）-.天車搬送系統(tǒng)（OHS-.物料控制系

45、統(tǒng)（MCSClean Robot潔凈機械手Loader/ Un loader上下料機Sorter分片機CIM Server 集成控制系 統(tǒng)服務器MES DB ServerMES數(shù)據(jù)服務器MES APP ServerMES應用服務器EDA/EDB ServerEDA/EDB服務器FDC ServerFDC服務器PMS ServerPMS服務器YMS ServerYMS服務器File Server文件服務器Cen tralized Backup/Recovery Server中央備份服務器Developme nt Server開發(fā)服務器Testi ng Server測試服務器Storage/Dis

46、k Array磁盤陣列SAN Switch/Storage LinkSAN交換機Tape Library磁帶庫Switch網(wǎng)絡交換機Router網(wǎng)絡路由器TIANMATFT工藝流程、材料、設備、生產(chǎn)常用中英文標準名稱Q/S0001-2007第 18頁共 23 頁Firewall網(wǎng)路防火墻Message Bus信息總線TIBCO Ren dezvousTIBCO消息集聚器Data Protector數(shù)據(jù)保護者Facility工程Exhaust Fan (FRP)排氣風機（玻璃鋼離心式）UPW system純水超純水設備Auto con trol system自動控制系統(tǒng)CDA system壓縮空

47、氣系統(tǒng)Bulk gas supply system大宗氣體供應系統(tǒng)Exhaust Fan排氣風機Fan Filter Unit送風過濾系統(tǒng)Gas and liquid leak detecti on system氣體和液體測漏系統(tǒng)Diesel oil gen erator柴油發(fā)電機系統(tǒng)VOC scrubber有機物蒸氣洗凈機Plant Vacuum pump工廠真空系統(tǒng)clea ning vacuum pump清潔真空系統(tǒng)waste water mon itor system廢水檢測系統(tǒng)vesda system空氣煙感探測分析系統(tǒng)chiller冷水機組cooli ng tower冷卻塔HVAC

48、 PUMP空調水泵heat en ergy supply system集中供熱系統(tǒng)LPG systemLPG站系統(tǒng)PCW systemPCW系 統(tǒng)35KV tran sformer35KV變壓器Telepho ne system電話系統(tǒng)CATV system有線電視系統(tǒng)broadcasti ng system廣播系統(tǒng)fire alarm system火警系統(tǒng)WWT廢水處理系統(tǒng)35KV switch device35KV開關裝置Mv switchgears, cast coil tra nsformers, un it substati ons, power scada中壓變配電系統(tǒng)Securi

49、ty & CCTV system安保和閉路電視系統(tǒng)Fire fighting system消防系統(tǒng)An alysis room 分析室Sin gle head scriber單刀頭切割機Con tact An gle接觸角測量儀Eyewash洗眼臺Wet station帶通風櫥的中央實驗臺TFT工藝流程、材料、設備、生產(chǎn)常用中英文標準名稱第19頁共23頁四.TFT生產(chǎn)常用中英文名稱En glish n ame中文名稱Gen eral一般專有名詞LCD (Liquid Crystal Display)液晶顯示器Glass, substrate or glass substrate玻璃基版TFT(Thi n Film Tra nsistor)薄膜晶體管Panel面板Array陣列Cell液晶盒Module模塊Mo nitor監(jiān)視器Pixel像素Computer電腦Notebook PC筆記本電腦（簡稱為 NE）RGB (Red, Green, Blue)指紅綠藍三基色PM (Preve ntive Maintenan ce)預防保養(yǎng)Quality品質Sta