半導體廠廢水來源及處理介紹

1、Newlvit 04/08/20121Wastewater Treatment System of CISEMIWastewater Treatment System of CISEMICISEMI廢水處理系統(tǒng)1期簡介Newlvit 04/08/20122ContentContentu Waste Water System Waste Codes in China Wastewater Effluent Standard Waste Classification Waste Definition Wastewater System Flow Waste Chemical Collection

2、Chemical Dosing SystemWaste Tank Material & List Waste Photoresist Lifting station Layout Waste Water Lifting Station Wastewater Treatment LayoutNewlvit 04/08/20123Waste Codes in ChinaWaste Codes in Chinau中華人民共和國水污染防治法中華人民共和國水污染防治法 (水水) 中華人民共和國國家標準中華人民共和國國家標準 地面水環(huán)境質(zhì)量標準地面水環(huán)境質(zhì)量標準 中華人民共和國國家標準中華人民共和國國家標

3、準 地下水環(huán)境質(zhì)量標準地下水環(huán)境質(zhì)量標準 污水綜合排放標準污水綜合排放標準GB 8978-2002之第三級標準之第三級標準 其中氨氮實行二級標準其中氨氮實行二級標準 污水處理設施環(huán)境保護監(jiān)督管理辦法污水處理設施環(huán)境保護監(jiān)督管理辦法 污水排入城市下水道水質(zhì)標準污水排入城市下水道水質(zhì)標準 Newlvit 04/08/20124Waste Codes in ChinaWaste Codes in Chinau國家危險廢物名錄國家危險廢物名錄HW06有機溶劑廢物：廢催化劑；有機溶劑廢物：廢催化劑； 清洗剝離物、反應殘渣清洗剝離物、反應殘渣 及濾及濾 物與載體廢物物與載體廢物感光材料廢物：廢顯影液定影液

4、、正負膠片、相紙及藥品感光材料廢物：廢顯影液定影液、正負膠片、相紙及藥品表面處理廢物：廢電鍍?nèi)芤?、鍍槽淤渣、電鍍水處理污泥表面處理廢物：廢電鍍?nèi)芤?、鍍槽淤渣、電鍍水處理污泥、處理酸堿渣、氧化槽渣、磷化渣、處理酸堿渣、氧化槽渣、磷化渣 HW22含銅廢物含銅廢物HW24含砷廢物含砷廢物HW31含鉛廢物含鉛廢物HW32無機氟化物廢物：氫氟酸無機氟化物廢物：氫氟酸不包括氟化鈣不包括氟化鈣HW34廢酸：廢硫酸、硝酸、廢酸：廢硫酸、硝酸、 磷酸磷酸 HW35廢堿：廢堿：NaOH、KOHHW42廢有機計溶劑：異丙醇、丙酮、環(huán)戊酮、二甲苯廢有機計溶劑：異丙醇、丙酮、環(huán)戊酮、二甲苯Newlvit 04/08/2

5、0125Wastewater Effluent StandardWastewater Effluent Standard項目單位驗收標準三級標準備注pH696-9CODppm350500SSppm250400F-ppm1520NH4-Nppm25按二級標準25其他水質(zhì)項目亦須符合其他水質(zhì)項目亦須符合GB 8978-2002 GB 8978-2002 污水綜合排放標準之第三級標準。污水綜合排放標準之第三級標準。Newlvit 04/08/20126Waste ClassificationWaste ClassificationWastewaterFrom FabDr-RECDr-DHFGener

6、al Acid/CausticWastewaterDr-GWDr-HPMDr-APMFluorideWastewaterDr-MHFDr-HHFDr-CMP-MDr-CMP-OAcidWastewaterDr-H2SO4Dr-H3PO4SolventWastewaterDr-Sol.Dr-IPAPhoto ResistWastewaterDr-PR-PDr-FLDr-ESDr-H2SO4+HFDr-CMP-IDr-L/SDr-PR-NReclaimWastewaterCMPWastewaterDr-CMP-PNewlvit 04/08/20127Waste ClassificationWast

7、e ClassificationDI Water PlantDr-CAREGDr-MGREGHVACChemicalRoomDr-C/SDr-CTBWDr-GWDr-MHFDr-H2SO4Dr-Sol.Dr-HPMDr-H3PO4To FWWTo GWWTo GWWTo GWWWastewaterFrom FacilityNewlvit 04/08/20128Drainage Classification For Chemical RoomDrainage Classification For Chemical RoomGroup NameRoom NameEquipmentWaterDrai

8、nRemarkDI/CWDRG/CHCl roomHCl CDSDIDR-HPMAcid room-11%HF CDSDIDR-MHF49%HF CDSPoly(I) CDSPoly(II) CDSH3PO4 CDSDR-H3PO4HNO3 CDSDR-GW/MHFAcid room-2BHF7:1 CDSDIDR-MHFBHF40:1 CDSBHF400:1 CDSCaustic roomDev#1 CDSDIDR-GWDev#2 CDS29%NH4OH CDS0.5%NH4OH CDSNewlvit 04/08/20129Group NameRoom NameEquipmentWaterD

9、rainRemarkDI/CWDRSolvent roomIPA CDSNADR-Sol防爆防爆IPA storage tankRinse#1 CDSRinse#1 storage tankACT-935 CDSEG CDSDev#3 CDSH2SO4 roomH2SO4 CDSDIDR-H2SO4H2SO4 storage tankH2O2 roomH2O2 CDSDIDR-GWH2O2 storage tankDev storage roomDev#1 storage tankDIDR-GWDev#1 storage tankDrainage Classification For Chem

10、ical RoomDrainage Classification For Chemical RoomNewlvit 04/08/201210Waste DefinitionWaste Definitionu Definition of liquid waste in wastewater treatment - 1 Dr-GW, Dr-HPM & Dr-APM (General Waste) Quick Dump Rinse step of chemical bath drain (APM, HPM, SPM excluding for HF), Others (Including SO4-2

11、, PO4-3 & Organic Solvent), Resistance 2M-cm. Dr-FL Floor drain. Dr-ES Emergency shower. Dr-HHF 49%, Fluoride contain chemical drain. Dr-MHF Less than 49%, Fluoride contain chemical drain. Dr-DHF Quick Dump Rinse Fluoride contain chemical drain. Dr-CMP-M Contain Metal slurry of CMP & wafer scrubber

12、drain. Dr-CMP-O Contain Oxide slurry of CMP & wafer scrubber drain.Newlvit 04/08/201211Waste DefinitionWaste Definitionu Definition of liquid waste in wastewater treatment - 2 Dr-CMP-P Contain Poly slurry of CMP & wafer scrubber drain. Dr-CMP-I CMP Idling water drain. Dr-H2SO4 SPM Drain. Dr-H3PO4 H3

13、PO4 Drain. Dr-H2SO4+HF Sulfuric acid + Hydrofluoric acid Drain. Dr-Solvent Organic solvent Drain. Dr-IPA IPA Drain. Dr-ACT-935 ACT 935 Drain. Dr-PRP & Dr-PRN Photo resistance drain.Newlvit 04/08/201212Waste DefinitionWaste Definitionu Definition of liquid waste in wastewater treatment -3 Dr-L/S Loca

14、l Scrubber drainage and blow down. Dr-C/S Central Scrubber drainage and blow down. Dr-CAREG C/A Regeneration water. Dr-MGREG MGR Regeneration water. Dr-CTBW Cooling Tower drainage and blow down.Newlvit 04/08/201213HF Treatment System FlowHF Treatment System FlowHF Collection Tank 30 M3Dr-DHFDHFLifti

15、ng Tank20 M3 Dr-HHFHHFLifting Tank20 M3 Dr-CMPCMPCollection Tank10 M3 From EMPFrom SLCTFrom SLFPFrom WWSUPAir BlowerTo HFWRTNewlvit 04/08/201214HF Treatment System FlowHF Treatment System FlowNaOH HFWReactionTank210 M3HFWReactionTank310 M3HFWReactionTank410 M3M HFWSedimentationTankL3.8m*W3.8m*H3.05m

16、To AWCTM CaCl2 Polymer PAC M M HFWReactionTank110 M3H2SO4M To SLCTTo HFWRTFrom CDA Newlvit 04/08/201215HF Treatment System FlowHF Treatment System FlowHFWSludge storageTankL3.8m*W3.8m*H3.05mM From CDA TO HFWCTSlurry FilterpressFrom HFWST Lorryout英文簡寫說明EMP：Emergency Pump SLCT：Sludge Storage Tank HFWR

17、T：HFW Reaction Tank AWCT：AW Collection TankSLFT：Slurry Filterpress WWSUP：Wastewater Sump PumpHFWST：HFW Sedimentation Tank HFWCT： HFW Collection TankTo HFWCTNewlvit 04/08/201216GW Treatment System FlowGW Treatment System FlowAW Collection Tank 100 M3Dr-GMAWLifting Tank10 M3 From EMPFrom HFWSTFrom CSU

18、PAir BlowerFrom ASUPFrom MMF/ACF Backwash WWFrom Reclaim BypassTo AWNTNewlvit 04/08/201217GW Treatment System FlowGW Treatment System FlowNaOH M M AWNeutrTank123 M3H2SO4M AWNeutrTank323 M3AWNeutrTank223 M3AWEffluentTank12 M3DischargeTo EMT Newlvit 04/08/201218EM System FlowEM System FlowEmergencyTan

19、k 150 M3AW Collection Tank 100 M3HF Collection Tank 30 M3AWEffluentTank12 M3To AWCTTo HFCT Newlvit 04/08/201219Waste Chemical CollectionWaste Chemical CollectionSolvent LiftingTank 5 M3Dr H2SO4Dr H3PO4Dr SOLLorryoutNewlvit 04/08/201220Waste Waste PhotoresistPhotoresist Collection CollectionDr Waste

20、PhototesistLorryoutWaste Photoresist Lifting Tank 5 M3Newlvit 04/08/201221Chemical Dosing CollectionChemical Dosing CollectionNaOH Tank 20 M3LorryinTo AWNTTo HFWRT From AWNTFrom HFWRT H2SO4 Tank 10 M3LorryinTo AWNTTo HFWRT From AWNTFrom HFWRT Newlvit 04/08/201222Chemical Dosing CollectionChemical Do

21、sing CollectionGaCl2 Tank 20 M3LorryinTo HFWRT From HFWRT Newlvit 04/08/201223Chemical Dosing CollectionChemical Dosing CollectionPAC Tank 5 M3LorryinTo HFWRT PAM Tank 5 M3To HFWRT Manual Newlvit 04/08/201224P&ID and Water Balance P&ID and Water Balance Newlvit 04/08/201225Waste SegregationWaste Seg

22、regation Piping：Classified as possible. System： - General Waste - HF - Sludge Dewater - Chemical Dosing - Waste Chemical Collection Dike Area： - Acid Waste：H2SO4, H2SO4+ HF, H3PO4, HF - Caustic Chemical：NaOH - Acid Chemical：CaCl2, PAC, (Polymer) - Organic Waste：Solvent, IPA, PRNewlvit 04/08/201226Wastewater Tank MaterialWastewater Tank MaterialAW Lifting TankSS+FRPAW Collection TankConcrete+FRPAW Neutralization Tank1Concrete+FRPAW Neutralization Tank2Concrete+FRPAW Neutralization Tank3