干涉測距模塊

Introduceaboutlasertracker’sperformanceevaluation（現(xiàn)有激光跟蹤儀評定方法）Methodforhowtocalibratealasertracker’sangle&distance（激光跟蹤儀測角和測距精度的校準(zhǔn)方法）c（雙軸激光跟蹤儀校準(zhǔn)裝置）

4DesignplansforLasertrackercalibrationdevice（4種跟蹤儀校準(zhǔn)裝置的設(shè)計方案）Contents內(nèi)容1Lasertracker’sperformanceevaluationCalibratingIn-lab實驗室校準(zhǔn)Evaluatingin-site現(xiàn)場檢查Evaluatingin-sitemeanstochecktheperformanceoflasertrackermeasuringapointinworkshopenvironment.檢查跟蹤儀在某種特定的使用環(huán)境下所能達到的綜合測量能力（如空間坐標(biāo)測量能力、空間測長測量能力）。Twopathstolasertracker’sperformanceevaluation(激光跟蹤儀的兩種評定方式)CalibratingIn-labmeanstochecktheperformanceoflasertracker’sangleindexesInterferometer,laserdistancemeter,retro-reflector,environmentsensoretc.inastandardenvironmentlaboratoryandverifytheirmaximumpermissionerror(MPE).檢查的是集成在跟蹤儀內(nèi)部的雙向測角編碼器、激光干涉儀、激光測距儀、目標(biāo)跟蹤傳感器及目標(biāo)反射鏡、環(huán)境傳感器等關(guān)鍵部件的技術(shù)指標(biāo)是否滿足生產(chǎn)商提供的指標(biāo)要求，即檢查出設(shè)備的最佳測量能力。Lasertracker（linearslider）whosestandardmagnitudeisreferencelength;（激光干涉儀（直線導(dǎo)軌）--標(biāo)準(zhǔn)量是參考長度）Lineartargetarraywhosestandardmagnitudeisthedistancebetweentargetcentercoordinatesandthetargetitself.（直線目標(biāo)陣列--標(biāo)準(zhǔn)量是目標(biāo)中心點坐標(biāo)和目標(biāo)之間距離）1Lasertracker’scalibrationmethod現(xiàn)有激光跟蹤儀校準(zhǔn)方法CalibratingIn-lab

實驗室校準(zhǔn)CalibratingIn-site

現(xiàn)場校準(zhǔn)Fixedlengthscalewhosestandardmagnitudeisreferencelength.（定長標(biāo)尺--標(biāo)準(zhǔn)量是參考長度）Fixedtargetwhosestandardmagnitudeisspacecoordinates.（固定目標(biāo)--標(biāo)準(zhǔn)量是空間坐標(biāo)）LaserTracker’scommonlyusedcalibrationequipment激光跟蹤儀常用的校準(zhǔn)設(shè)備序號單位建立時間測量范圍備注1中航304所(AVIC304Institute)1999水平軸36m俯仰軸2.1mhorizontalaxis36mpitchingaxis2.1m水平軸、俯仰軸獨立Independenthorizontalaxisandpitchingaxis2中國計量院2010水平軸80m俯仰軸1.2m俯仰軸位于水平軸上pitchingaxisabovehorizontalaxis3成都飛機制造公司2011水平軸25m俯仰軸1.0m俯仰軸位于水平軸上4西安飛機制造公司2012水平軸25m僅有水平軸5航天計量測試技術(shù)所2013水平軸10m俯仰軸2.0m水平軸、俯仰軸獨立Atpresentthedomesticmaincalibrationmethodoflasertrackerisdouble-axiscalibrationmethod:Horizontalaxisisusedtocalibratehorizontalangleoftracker,built-ininterferometerandrangefinder.Verticalaxisisusedtocalibratepitchangleoftracker.Unitswhichhavetheabilitytocarryoutcalibrating

In-labindomesticareshowninTable1.目前國內(nèi)激光跟蹤儀的校準(zhǔn)方法基本上采用雙軸校準(zhǔn)法：水平軸--校準(zhǔn)跟蹤儀的水平角和內(nèi)置干涉儀及測距儀垂直軸--校準(zhǔn)跟蹤儀的俯仰角。目前能夠?qū)崿F(xiàn)跟蹤儀實驗室校準(zhǔn)的典型單位見表1。1Lasertracker’scalibrationmethod現(xiàn)有激光跟蹤儀校準(zhǔn)方法2

Due-axisLasertrackercalibrationprinciple激光跟蹤儀雙軸校準(zhǔn)原理Basicidea--Adjustrelativepositionbetweenthelasertrackerandrailinordertoseparateindividualerrorsofsystem.基本思路--調(diào)整激光跟蹤儀與導(dǎo)軌的相對位置分離出系統(tǒng)的單項誤差。Placedatoneendofthehorizontalguiderail放置在水平導(dǎo)軌一端Remaintracker'sazimuthandpitchangleunchanged，andcalibrateitsrangingerror.（跟蹤儀的方位角和俯仰角保持不變，校準(zhǔn)跟蹤儀測距誤差。）Remaintracker'spitchangleunchanged，andcalibrateitsazimuthanglemeasurementerror.（跟蹤儀俯仰角保持不變時，校準(zhǔn)跟蹤儀方位角的測角誤差。）Remaintracker'sazimuthunchanged，andcalibrateitspitchanglemeasurementerror.（跟蹤儀方位角保持不變，校準(zhǔn)跟蹤儀俯仰角的測角誤差。）Placedinfrontofthehorizontalguiderail放置在水平導(dǎo)軌前方Placedinfrontoftheverticleguiderail放置在垂直導(dǎo)軌前方BasicPrinciple--Placedtrackermirrorandinterferometermirroronthesameworkbench,whentheworkbenchismovedacertaindistance,displacementmeasuredbytheinterferometer-L0andcoordinatesoftwotargetpointsmeasuredbytracker--P1,P2canbeobtained.Thenthedistancebetweenthe2points(L)canbecalculatedbythefollowingformula:inwhichAmeansanglebetween2targetpoints.基本原理--跟蹤儀的反射鏡與干涉儀的反射鏡放置在同一工作臺上，當(dāng)工作臺移動一定距離后，得到干涉儀的位移量L0和跟蹤儀的兩點坐標(biāo)P1、P2，它們之間的距離為L,其中A為兩目標(biāo)點之間的交角。2

Due-axisLasertrackercalibrationprinciple激光跟蹤儀雙軸校準(zhǔn)原理Remaintracker'sazimuthandpitchangleunchanged當(dāng)方位角和俯仰角不變時Ignoredanglemeasurementimpact,rangingerroroftrackeris

忽略測角誤差影響，跟蹤儀的測距誤差I(lǐng)gnoredrangingandpitchimpact,azimuthmeasurementerroroftrackeris忽略測距和俯仰角的影響，跟蹤儀的方位角測角誤差Remainpitchangleunchanged，andchangeazimuth當(dāng)俯仰角不變，方位角改變時Remainazimuthunchang-ed，andchangepitchangle.當(dāng)方位角不變俯仰角改變時Ignoredrangingandazimuthimpact,pitchanglemeasurementerroroftrackeris忽略測距和方位角的影響，跟蹤儀的俯仰角測角誤差2

Due-axisLasertrackercalibrationprinciple激光跟蹤儀雙軸校準(zhǔn)原理3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置(opratingstroke)＞10m工作行程(straightness)≤0.15mm直線度(uncertaintyofmeasurement)測量不確定度(2.0+0.5L)μm,k=2,(workingspeed)＞500mm/s運動速度(opratingstroke)＞2.0m工作行程(straightness)≤0.05mm直線度(uncertaintyofmeasurement)測量不確定度

（2.0+0.5L)μm,k=2,(workingspeed)＞100mm/s運動速度Verticalaxis垂直軸Horizontalaxis水平軸Technicalparameters技術(shù)參數(shù)HorizontalXaxis:10mprecisionlinearguiderail,lengthmeasuringsystemVerticalYaxis:2mlinearguidesystem,lengthmeasuringsystem4environmentalcompensationsystem，dual-axismotioncontrollingsystem,Analysisingsoftwareplatform,etc.(水平X軸：10m精密直線導(dǎo)軌、長度測量系統(tǒng)垂直Y軸：2m直線導(dǎo)軌系統(tǒng)、長度測量系統(tǒng)四路環(huán)境補償系統(tǒng)雙軸運動控制系統(tǒng)分析處理軟件應(yīng)用平臺等組成。)Regardlaserinterferometerasmeasurementstandardofthedistancebetweentwotargetpoints,placetrackermirrorandinterferometermirroronworkbench,whichismotor-drivenandmovealonglinearguiderail.Thedeviationbetweendistancethatinterferometermovedanddistancethattargetmovedcanreflectthemeasurementerror.(采用激光干涉儀作為兩點之間距離的測量標(biāo)準(zhǔn)，干涉儀的反射鏡和跟蹤儀的反射鏡放置在工作臺上，工作臺由電機驅(qū)動，沿直線導(dǎo)軌運動。工作臺移動時干涉儀反射鏡的移動距離與被測目標(biāo)的移動距離的偏差值反映了被校系統(tǒng)的測量偏差。)Components系統(tǒng)構(gòu)成Workingprocess工作過程3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置10mlongprecisionlinearguiderailwhichhascogbeltstructure,feature：fastmovementspeed,cansavetimeofcalibrating.Supportingmechanism--selectmarbleplatformwithhighrigidityandstabilityasareferencefeature：highflatnessandstraightnessaccuracy,large-areaworkbenchenvironmentalcompensationuints--4branchesoftemperature，1branchofairpressure，1branchofhumidityfeature:placedonhorizentalguiderail,closedtolightpath，canmeasureenvironmenttemperaturearoundlightpathwithhigheraccuracy.10m精密直線導(dǎo)軌---選用齒形帶結(jié)構(gòu)的直線運動導(dǎo)軌特點：運動速度快，可大大減少校準(zhǔn)所用的時間。支撐機構(gòu)---選擇剛性好穩(wěn)定性強的大理石平臺作為基準(zhǔn)特點：平面度和直線度精度高，工作平臺面積大。環(huán)境補償單元---4路溫度、1路氣壓、1路濕度特點：放置在水平導(dǎo)軌上，與光路靠近，可更準(zhǔn)確的獲得測量光路所處環(huán)境的溫度值。Horizontalaxis水平導(dǎo)軌3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置laserinterferometer激光干涉儀referenceplatform基準(zhǔn)平臺Interferometriccombination干涉組合interferometermirror干涉儀反射鏡linearguiderail直線導(dǎo)軌airsensor空氣傳感器marbleplatform大理石平臺movingplatform移動平臺3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置2mlongverticallinearguiderailwhichisballscrewdrivenfeature:highloadandlong-termbearingcapacity,reliablelinearmotionandstability.basisplatform：solidmetalplatformofLevel00feature:nodistortion,canadjusttoparallelwiththehorizontalguiderail.Supportingmechanism：l=ltypemetalbackframefeature：solidstructure，Stablestructure,goodshockresistance,convenienttoadjustrailstraightness.2m垂直直線導(dǎo)軌----選用滾珠絲桿傳動的直線導(dǎo)軌特點：具有高載荷和長時承載的能力，能夠擁有可靠的直線運動、穩(wěn)定性好?；A(chǔ)平臺---00級穩(wěn)固的金屬平臺特點：不易變形，可通過調(diào)整與水平導(dǎo)軌平行。支撐機構(gòu)---I=I型金屬背架，特點：結(jié)構(gòu)穩(wěn)定，抗震性好，便于導(dǎo)軌直線度調(diào)整。Verticalguiderail(豎直導(dǎo)軌)3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置ControllerwhichadoptsPLCascontrolcore,andisresponsibleformotioncontrolofentiresystemfeature:itcanimprovethesystem'sstabilityandcontrollingaccuracy,enhancesystem'santi-interferenceability.Motor:thehorizontalandverticalaxesarebothdrivenbyACservomotorfeatures:canbecontrolledbyhigh-speedpulseoutputofPLC,selecthigh-speedpulse+directioncontrolmode,canpinpointthelocationofthemechanicalmovementposition.Operation----touchscreenandkeyboardcontrolintwowaysfeatures:Touchscreencanprovideaclearman-machineinterface,keyboardcontrolcanmaketheoperationeasierandmoreconvenient控制器---采用PLC作為控制核心，負(fù)責(zé)整個系統(tǒng)的運動控制特點：可提高系統(tǒng)的穩(wěn)定性和控制精度，增強系統(tǒng)的抗干擾性。電機---水平軸和垂直軸都采用AC伺服電機驅(qū)動特點：可由PLC的高速脈沖輸出口控制，選用高速脈沖+方向的控制模式，可以精確定位機械運動位置。操作方式----觸摸屏與鍵盤控制兩種方式特點：觸摸屏可提供清晰的人機操作界面，鍵盤控制可使操作更加簡單方便。controller控制器3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置softwareplatform軟件平臺Interferencerangingmodule（干涉測距模塊）ThismodulecanachieveInterferometerconfiguration,displayinterferencedata,andcontrolmeasurementmode.可以實現(xiàn)干涉儀的配置、干涉數(shù)據(jù)的顯示、測量模式控制。Environmentalmonitoringmodule環(huán)境監(jiān)控模塊Thismodulecandisplay,collectandmanagelabenvironmentstateautomatically,supportreal-timemonitoringofquadtemperature,onebranchofpressureandonebranchofhumidity.可以自動采集顯示、管理實驗室環(huán)境狀態(tài)，支持四路溫度、一路氣壓、一路濕度的實時監(jiān)控Dual-axislinearmotionguidescontrollingmodule雙軸直線運動導(dǎo)軌控制模塊Thismodulecancontrolmovementsofhorizontalandverticallinearmotionguidesinseveralpatterns,includingmanual,automatic,cyclingmovingmode,etc.可以對水平直線運動導(dǎo)軌和豎直直線運動導(dǎo)軌進行多種運動模式控制，包括手動、自動、循環(huán)等運動模式。datamanagingmodule數(shù)據(jù)管理模塊Thismodulecanmanagedatameasuredbyinterferometer,includingdatanaming,storage,display,analysis,preservation,andotherfunctions,inaddition,analysisfunctionincludecalibrationresultsevaluation.可以對干涉儀測量是數(shù)據(jù)進行管理，包括數(shù)據(jù)的命名、存儲、顯示、分析保存等功能，其中分析功能中包括對被校設(shè)備校準(zhǔn)結(jié)果的評價。3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準(zhǔn)裝置Software--chart軟件--結(jié)構(gòu)圖干涉測距模塊Interferencerangingmodule環(huán)境監(jiān)控模塊Environmentalmonitoringmodule運動控制模塊MotionControlModuletemperaturepressurehumidity溫度氣壓濕度horizontal/verticalaxisdisplacement水平軸位移豎直軸位移datamanagingmodule數(shù)據(jù)管理模塊interferometermeasurementdata干涉儀測量數(shù)據(jù)relationshipsofmodules各模塊之間的關(guān)系Software--Measurementanddatamanagementmodule軟件--測量及數(shù)據(jù)管理模塊Software--Environmentalmonitoringmodule軟件--環(huán)境監(jiān)控模塊Software--Due-axismotioncontrolmodule軟件--雙軸運動控制模塊四、Trackercalibrationdevicedesignschemecomparison跟蹤儀校準(zhǔn)裝置設(shè)計方案比較Program1Independentverticalaxis,horizontalaxisadoptthree-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.（豎軸獨立，水平軸采用三光路干涉測量,水平軸采用大理石導(dǎo)軌，氣浮式工作臺。）Program2Verticalaxisabovehorizontalaxis,horizontalaxisadoptthree-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.豎軸位于水平軸上，水平軸采用三光路干涉測量，水平軸采用大理石導(dǎo)軌，氣浮式工作臺。Program3Independentverticalaxis,horizontalaxisadoptsingle-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.豎軸獨立，水平軸采用單光路干涉測量，水平軸采用大理石導(dǎo)軌，氣浮式工作臺。Program4Independentverticalaxis,horizontalaxisadoptsingle-light-pathinterferometry,andmarbleguiderail,metalguiderail.豎軸獨立，水平軸采用單光路干涉測量，水平軸采用大理石平臺，金屬導(dǎo)軌。Scheme1方案1lightpath光路Horizontalaxisadoptthree-light-pathsynchronousinterferometry,compensateAbbeerrorinrealtimetoachieve"coaxialsynclastic"measurement.水平軸采用三光路干涉同步測量，實時進行阿貝誤差補償，實現(xiàn)“同軸同向”測量。structure結(jié)構(gòu)independenthorizontalaxisandverticalaxis.Horizontalaxisadoptmarbleguiderail,airfloatingworkbench.Verticallinearguiderailismechanicalaxis，whichisballscrewdriven..水平軸與豎軸分開，各自獨立。水平軸采用大理石導(dǎo)軌，氣浮式工作臺。豎軸為機械軸，滾珠絲桿傳動。

index指標(biāo)horizontalaxismeasurablerange(橫軸可測范圍):<80m,

MeasurementUncertainty（測量不確定度）:0.3+0.3LmmVerticleaxismeasurablerange（豎軸可測范圍）:>2m

,MeasurementUncertainty（測量不確定度）:1+0.5LmmFeature特點Highprecision,simplestructure.（精度高，結(jié)構(gòu)簡單。）Theoveralleffectdiagram總體效果圖Scheme1方案1Independentverticalaxis獨立豎軸Scheme1方案1Horizontalaxisthree-light-path水平軸三光路Scheme1方案1Verticalaxissingle-light-path豎軸單光路Scheme1方案1Scheme2方案2Horizontalaxisadoptthree-light-pathsynchronousinterferometry,compensateAbbeerrorinrealtimetoachieve"coaxialsynclastic"measurement.水平軸采用三光路干涉同步測量，實時進行阿貝誤差補償，實現(xiàn)“同軸同向”測量。Verticalaxisisabovehorizontalaxis，biaxiallinkage.Horizontalaxisadoptmarbleguiderail,airfloatingworkbench.Verticallinearguiderailismechanicalaxis，whichisballscrewdriven..豎軸位于橫軸上，雙軸聯(lián)動。水平軸采用大理石導(dǎo)軌，氣浮式工作臺。豎軸為機械軸，滾珠絲桿傳動。horizontalaxismeasurablerange(橫軸可測范圍):<80m,

MeasurementUncertainty（測量不確定度）:0.3+0.3LmmVerticleaxismeasurablerange（豎軸可測范圍）:1m

,MeasurementUncertainty（測量不確定度）:2+2Lmm(singlemarble4m)Horizontalaxishashighprecision,canprovidestandardlaserplane,whi