TFT相關(guān)中英文對照表課件

1、 第23頁共23頁 工藝流程、材料、設(shè)備、生產(chǎn)常用中英文標(biāo)準(zhǔn)名稱 版 號： 1.0 總 頁 數(shù)： 23 制定部門： 生效日期： 年 月 日 擬 制： 審 核： 標(biāo) 準(zhǔn) 化： 會 簽： 批 準(zhǔn)： 發(fā)布 實施 更改狀態(tài)更改內(nèi)容更改人更改日期一TFT工藝流程中英文標(biāo)準(zhǔn)名稱Array Process Flow陣列段工藝流程Input投料Unpacking拆包裝Initial clean預(yù)備清洗Particle count塵埃粒子測試Gate柵電極層Clean before depo成膜前清洗Gate （Mo/Al alloy ) Film depo柵電極成膜RS meter電阻測量Macro Insp

2、ection宏觀檢查Clean before PR涂膠前清洗Pre bake預(yù)烘PR Coating光刻膠涂布PR vacuum dry(VCD)光刻膠低壓干燥PR soft bake前烘Expose曝光Titler Expose/Edge Expose打標(biāo)/邊緣曝光Develop顯影PR hard bake堅膜ADI 顯影后自動光學(xué)檢查Mic/Mac Inspection宏微觀檢查CD after develop顯影后關(guān)鍵尺寸檢查Total pitch長寸測量Gate Wet etch柵電極濕刻Contact angle接觸角測量PR strip光刻膠剝離CD after etch刻蝕后關(guān)鍵

3、尺寸測量AEI刻蝕后自動光學(xué)檢查Micro/Macro Inspection宏微觀檢查Laser Repair激光修補Active層Clean before depo成膜前清洗Active film depoActive成膜AOI自動光學(xué)檢查Macro Inspection宏觀檢查Thickness Measurement厚度測量Clean before PR涂膠前清洗Pre bake預(yù)烘PR Coating光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expose曝光Develop顯影PR hard bake堅膜ADI顯影后自動光學(xué)檢查Mic/Mac Insp

4、ection宏微觀檢查Active film Dry etch & AshingActive膜干刻與灰化Thickness Measurement厚度測量PR strip光刻膠剝離AEI刻蝕后自動光學(xué)檢查Mic/Macro Inspection宏微觀檢查S/D源/漏電極層Clean before depo成膜前清洗S/D Mo film depo源/漏電極成膜RS meter電阻測量MACRO Inspection宏觀檢查Clean before PR涂膠前清洗Pre bake預(yù)烘PR Coating光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expo

5、se曝光Edge expose邊緣曝光Develop顯影PR hard bake堅膜ADI 顯影后自動光學(xué)檢查MIC/MAC Inspection宏微觀檢查CD after develop顯影后關(guān)鍵尺寸檢查Hard bake by oven烘爐堅膜S/D Mo Wet etch源電極/漏電極濕刻n+ a-Si Dry etchn+高摻雜膜干刻PR strip光刻膠剝離Thickness Measurement厚度測量CD after etch刻蝕后關(guān)鍵尺寸測量AEI刻蝕后自動光學(xué)檢查Micro/Macro Inspection宏微觀檢查Clean before O/S test短路/開路測試前

6、清洗Open/Short Test短路/開路測試Passivation保護層Clean before depo成膜前清洗Pass'n film depo保護膜成膜AOI自動光學(xué)檢查MACRO Inspection宏觀檢查Thickness Measurement厚度測量Clean before PR涂膠前清洗Pre bake預(yù)烘PR Coating光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expose曝光Edge expose邊緣曝光Develop顯影PR hard bake堅膜ADI顯影后自動光學(xué)檢查Micro/Macro Inspection宏微

7、觀檢查SinX Dry etch & ASHING氮化硅干刻與灰化PR strip光刻膠剝離AEI刻蝕后自動光學(xué)檢查Micro/Macro Inspection宏微觀檢查ITOITO層Clean before PR成膜前清洗a-ITO film depoITO成膜RS meter電阻測試Anneal煺火Macro Inspection宏觀檢查Clean before PR涂膠前清洗Pre bake預(yù)烘PR Coating光刻膠涂布PR vacuum dry光刻膠低壓干燥PR soft bake前烘Expose曝光Develop顯影PR hard bake堅膜ADI顯影后自動光學(xué)檢查Mi

8、cro/Macro Inspection宏微觀檢查ITO film etchITO膜濕刻PR strip光刻膠剝離AEI刻蝕后自動光學(xué)檢查Micro/Macro Inspection宏微觀檢查Final E/T最終電測Anneal煺火Array test陣列測試Array repair陣列修補TEG testTEG測試Sort分級Cell Process flow制盒段工藝流程CF Input彩膜投料CF Initial Clean彩膜預(yù)備清洗CF AOI彩膜自動光學(xué)檢查CF Sort彩膜分級PI配向膜Clean before PI 配向膜涂布前清洗PI Print配向膜涂布Pre-cure預(yù)

9、固化PI Inspection配向膜檢查PI Thickness Measurement配向膜厚度測量Main-cure固化PI rework配向膜返工ODFCF&TFT MatchingCF&TFT匹配Rubbing配向摩擦Rubbing Inspection摩擦檢查Loader & Un loader上料機/下料機Buffer緩沖器CST Buffer工裝欄緩沖器Rotation/Cooling Unit旋轉(zhuǎn)/冷卻單元Turn Align Unit旋轉(zhuǎn)/對位單元Turn Over Unit翻轉(zhuǎn)單元After Rubbing Cleaner摩擦后清洗Spacer Sp

10、ray襯墊球散布Spacer Counter襯墊球計數(shù)Spacer rework襯墊球返工Spacer Cure襯墊球附著固化Short Dispense導(dǎo)電膠涂布Sealant Dispense邊框膠涂布Seal Inspection邊框膠檢查LC Dispense液晶滴下Vacuum Assembly真空貼合UV Cure紫外線固化Mis-alignment check錯位檢查Seal Oven邊框膠熱固化Eye Inspection目視檢查Cell gap Measurement盒厚測試Cutting切割1/4(1/6)Sheet Cutting,1/4(1/6)切割Stick Cutt

11、ing,切條Cell Cutting切粒Visual TestVisual 測試ECPEdge Grind磨邊Dipping clean浸泡式清洗Clean before Pol 貼片前清洗Pol Attach貼片Pol Inspection貼片檢查Pol rework貼片返工Auto ClaveAuto Clave消泡Laser TrimmerLaser Trimmer激光切線Test測試Gross Test終檢Repair修補Bin sorter分級OQC Test出貨檢查Store貨棧Module Process Flow模塊段工藝流程COGPad cleaning端子清洗IC Bond

12、ingIC 邦定Microscope InspectionAOI 鏡檢自動光學(xué)檢查Adhesive test粘接力測試FOGACF AttachingACF 粘貼FOG BondingFOG 邦定Microscope Inspection鏡檢Peeling strength test拉力測試ET test1電測1IC or FPC Repair修補UV glue sealing 封膠FPC reinforcement補強UV glue curingUV膠固化Assembly組裝ET test2電測2anti-ultraviolet tape attaching遮光膠帶粘貼protected t

13、ape attaching保護膠帶粘貼Backlight assembly背光源組裝Backlight soldering背光源焊接Touch panel assembly觸摸屏組裝Final ET test最終電測Rework返工Aging老化QC testQC檢驗Code printing噴碼Packing包裝OQC Test出貨檢驗Finished good shipment合格品出貨CIM name集成控制系統(tǒng)名稱CIM計算機集成制造系統(tǒng)CIM System計算機集成制造系統(tǒng)Manufacturing Execution System(MES)制造執(zhí)行系統(tǒng)（MES）Preventive

14、 Maintenance System(PMS)設(shè)備預(yù)防保養(yǎng)系統(tǒng)（PMS）Statistical Process Control(SPC)統(tǒng)計過程管理（SPC）Equipment Automation Program(EAP)設(shè)備自動化（EAP）Report報表Engineering Data Analysis(EDA)工程數(shù)據(jù)分析（EDA）Finished Good Management System(FGMS)成品管理系統(tǒng)（FGMS）Product產(chǎn)品Glass玻璃基板Panel面板Process Flow工藝流程Operation操作EDC工程數(shù)據(jù)收集Equipment設(shè)備Chamber

15、腔體Unit單體Sub Unit副單體Port端口OIC (Operator Interface Client)操作者界面EDB工程數(shù)據(jù)庫FGMS成品管理系統(tǒng)Dispatcher派貨Create建立Start下線Scrap報廢Un scrap取消保廢Complete完成Ship出貨Un ship取消出貨Receive收料Track In入賬Track Out出賬Wait等待Hold滯留Release釋放Rework返工Vehicle搬運車Robot機械手AGV (Automatic Guided Vehicle)自動搬運車MGV (Manual Guided Vehicle)人工搬運車Clea

16、n lifter凈化電梯LIM (Linear Induction Motor) Carrier線性感應(yīng)馬達傳送載具OHS (Overhead Handling System)天車搬送系統(tǒng)Stocker (clean depot)工裝籃存放架Battery電池Bay作業(yè)區(qū)Inter-bay作業(yè)區(qū)和作業(yè)區(qū)之間Intra-bay作業(yè)區(qū)之內(nèi)Bumper減震緩沖器Charger充電器Controller控制器Conveyor傳送帶Crane吊車（在Stocker內(nèi)）FFU (Fan Filter Unit)風(fēng)扇過濾器Host主機I/O (Input / Output)輸入/輸出IR (Infra-Re

17、d)紅外線IRIF(Infra-Red Interface)紅外接口Load上料Unload下料Magnetic tape磁條(AGV路徑所使用的磁條)Retrieve檢索RTM (Rotary Transfer Machine)旋轉(zhuǎn)傳送機構(gòu)SCARA armAGV傳送臂Reset重新設(shè)定Transportation傳輸Recipe工藝參數(shù)的組合Stock out將工裝籃取出貨棧Request要求,請求Transfer傳送,運送Instruction命令,指令Select選擇Cancel取消Operation作業(yè),操作Support支援,支持Process工藝Start開始Batch批量Lot

18、批(指生產(chǎn)線的在制品或產(chǎn)品控制單位)ID (Identity)識別碼(如Lot ID or Chip ID)Sheet片(Array區(qū)玻璃基版計數(shù)單位)Inspection檢驗Defect缺陷Hold滯留Release釋放Equipment設(shè)備（簡稱為EQP）Tool工具,機臺WIP (Work In Process)在制品（工藝在制品）Maintenance維修保養(yǎng)Cassette工裝籃(陣列段),卡匣(制盒段及模塊段)Empty空的Reserve預(yù)備Report報告Rework返工Log on登錄，入系統(tǒng)Log off注銷登錄，離開系統(tǒng)Note批注Unpacking line拆包線Un p

19、acker拆包機Glass conveyor玻璃傳送帶Initial Cleaner預(yù)清洗Un loader下料機Cassette Manual Guide Vehicle (MGV)工裝籃人工搬運車Array CassetteArray工裝籃ODF CassetteODF工裝籃Automated Material Handling System(AMHS)自動物料搬運系統(tǒng)Clean Stocker(STK)潔凈工裝籃存放架（STK）Overhead Handling System (OHS)天車搬送系統(tǒng)（OHS）Material Control System (MCS)物料控制系統(tǒng)（MCS）

20、Clean Robot潔凈機械手Loader/Un loader上/下料機Sorter分片機二TFT材料中英文標(biāo)準(zhǔn)名稱類型TypeMaterials name材料名稱玻璃GlassGlass玻璃基板Color filter彩色濾光膜Bare glass白玻璃基板LCD Panel液晶面板靶材TargetAlNd/Al Target鋁釹/鋁靶材MoNb/Mo Target鉬鈮/鉬靶材ITO TargetITO靶材化學(xué)液體ChemicalAl EtchantAl蝕刻液ITO EtchantITO蝕刻液HNO3硝酸CH3COOH乙酸Developer顯影液Stripper剝離液MEA單乙醇胺Phot

21、o Resist光刻膠Organic Photo Resist有機膜用光刻膠Thinner稀釋劑NMPN-甲基-2-吡咯烷酮HF氫氟酸Acetone丙酮IPA異丙醇Ethanol酒精輔助器材Sub materialPhoto Mask光罩APR PlateAPR版Rubbing Cloth摩擦絨布Adhesive Tape雙面膠布Probe frame for array tester陣列電測架E/T Frame電測用探測架Cell ET Probe Unit屏電測用探測頭Open/Short tester and prober開路、短路電測用探測頭Teflon Tape特氟龍帶Silicon

22、 rubber硅膠皮Wiper Tape無塵卷布高純氣體High purity gasNF3三氟化氮SiH4硅烷SF6六氟化硫NH3氨氣Cl2氯氣HCL氯化氫CHF3三氟甲烷PH3磷烷CF4四氟甲烷N2氮氣O2氧氣H2氫氣Ar氬氣He氦氣液晶LCLC液晶材料膠膜FilmPolarizer偏光片Diffuser散光膜涂料DopePaintPI聚酰亞胺樹脂ResinSealant邊框膠UV glueUV膠ACF各向異性導(dǎo)電膜Conductive Spacer導(dǎo)電襯墊球Spacer used in Sealant邊框膠內(nèi)襯墊球Spacer used in Cell（White）盒內(nèi)襯墊球(白）Spa

23、cer used in Cell（Black）盒內(nèi)襯墊球(黑）元器件PartsBack Light Unit背光源Integrated circuit/Driver IC集成電路/驅(qū)動ICPCB印刷電路板FPC柔性印刷線路板Module Frame模塊外框Touch Panel/Touch film觸摸屏/觸摸膜RCL阻容器件焊接材料SolderingmaterialFLUX助焊劑SOLDER CREAM焊錫/焊接劑三TFT設(shè)備中英文標(biāo)準(zhǔn)名稱English name中文名稱PHOTO曝光Exposer曝光機Coater Developer陳列黃光制程清洗機-涂布機-顯影機long size m

24、easuring and critical dimension measuring multiple equipment測長儀和線寬測量儀 Titler& Edge Exposer打標(biāo)機和邊緣曝光復(fù)合機 Edge Exposer邊緣曝光機AFM原子力顯微鏡FIB聚焦離子束系統(tǒng)FE-SEM場發(fā)射掃描電子顯微鏡UV MeterUV照度計EXCIMER UV準(zhǔn)分子紫外清洗機Ionizer Bar除靜電棒Fire Extinguisher滅火器Photo Ionizer軟X射線靜電消除器PVD&WET濺射&濕式PVD(Multi-chamber type sputtering

25、system)磁控濺射成膜機Particle counter塵埃粒子測量儀Ultrasonic Cleaner超聲波清洗機Stripper脫膜機Contact Angle Analyzer接觸角測量儀RS Meter(4point Probe)四探針儀Cassette Cleaner工裝籃清洗機Initial Cleaner預(yù)備清洗機Pre CVD cleaner成膜前清洗機HF Cleaner before S/DS/D成膜前帶HF清洗機Liquid Particle Counter液體內(nèi)塵埃粒子測量儀CCSS中央化學(xué)品供應(yīng)系統(tǒng)Anneal Oven 退火爐Hard Bake Oven后烘爐

26、Film Tester薄膜附著力測試儀 Etchant Concentration Management System刻蝕液濃度管理系統(tǒng)DMS顯影液濃度管理系統(tǒng)DRS顯影液溶劑回收系統(tǒng)RMS剝離液濃度管理系統(tǒng)Wet Etcher濕刻機4.5G-Macro Review System4.5G宏觀檢查機4.5G-Mic/Mac Review System4.5G宏觀、微觀檢查機RGA(Residual Gas Analyzer)殘余氣體分析儀PECVD化學(xué)氣相沉積Hot N2 Transfer System熱N2供應(yīng)系統(tǒng)PECVD等離子增強化學(xué)氣相淀積設(shè)備Special Gas Supply &a

27、mp; Monitor System特種氣體供應(yīng)和監(jiān)視管理系統(tǒng)Temperature Recorder溫度記錄儀Gas Scrubber for PECVDPECVD用尾氣處理裝置Full Automatic Spectroscopic Ellipsometer for Flat Panel Display平板顯示用全自動橢圓偏振光譜儀Clean Crane潔凈室起重機設(shè)備Spectroscope Reflectometer平板顯示用全自動分光反射光譜儀He Leak Detector氦氣檢漏儀DRY干刻Dry Pump for CVD化學(xué)氣相沉積設(shè)備用真空泵Dry Pump for PVD物

28、理氣相沉積設(shè)備用真空泵EPD for Dry Etching干刻終點偵測器Dry pump for Dry Etching干刻機設(shè)備用真空泵Dry Etching/Ashing System 干刻灰化一體機Profiler System段差量測機Chiller for Dry Etching干刻機輔助設(shè)備冷卻器Local Scrubber System for Dry Etching干刻用廢氣處理設(shè)備CELL制盒Rubbing Line摩擦線Before PI cleanerPI前清洗機Cassette BF 工裝籃緩沖器PI PrinterPI涂布機Pre-Cure預(yù)固化爐Main-Cure

29、主固化爐Loader/Un loader上下料機APR cleanerAPR板清洗機Rubbing Inspection摩擦檢查機After Rubbing Cleaner摩擦后清洗機ODF SystemODF相關(guān)設(shè)備 Seal Dispenser邊框膠涂布機Short Dispenser導(dǎo)電膠涂布機Seal De-bubbling machine邊框膠脫泡機 UV cure紫外線固化機Spacer Cure Oven襯墊球固化爐Cooling /Rotation Unit冷卻/旋轉(zhuǎn)裝置Seal Cure Oven邊框膠固化爐LC dispenser液晶滴下機LC de-bubbling液晶脫

30、泡機Vacuum Assembly真空貼合系統(tǒng)Mis-align Checker對位檢查機 Visual Inspection目視檢查機ODF Inline transfer and line control blockODF聯(lián)線傳輸和軟件控制系統(tǒng)Loader(3port)上料機Un loader(3port)下料機Cassette Buffer卡匣緩沖器Turn Align Buffer旋轉(zhuǎn)對位緩沖器Pairing/NG Buffer配對/不良制品緩沖器Spacer NG Buffer襯墊球散布不良制品緩沖器Turn Over Align翻轉(zhuǎn)對位器UV Mask stockUV Mask 存

31、儲柜Buffer after UV cure紫外線固化后緩沖器Cooling Buffer冷卻緩沖器Spacer US Cleaner襯墊球超聲波清洗機Spacer Remover(USC)襯墊球聚團去除裝置（超聲波清洗機）US Cleaner after sealant dispensing邊框膠涂布后超聲波清洗機US Cleaner after short dispensing點膠后超聲波清洗機Master PLC主PLCCIM PCCIM PCSeal Inspection邊框涂布檢查機Cell Gap Inspection盒厚檢查機Dry Spacer Spray & Spac

32、er count干式散布機襯墊球計數(shù)器Auto Clave偏光片貼附后加壓消泡機Edge Grinder液晶面板磨邊機LCD Panel cleaning and Polarizer attach system液晶面板清洗和偏光板貼附機系統(tǒng)Panel Cleaner面板清洗機（用于液晶面板清洗和偏光板貼附機系統(tǒng)）Polarizer Attach Machine偏光板貼附機（用于液晶面板清洗和偏光板貼附機系統(tǒng)）LCD Panel Polarizer Rework Machine液晶面板偏光片返工機Cell Cassette(3"-10.4")3"-10.4"

33、;Cell卡匣Single head scriber單刀頭切割機LCD glass in-line Scriber液晶面板在線切割機Multi head Scriber多刀頭切割機MODULE模塊COG bonding machine自動COG邦定機COG Semi-automatic Bonding Machine半自動COG邦定機Aging test system老化測試系統(tǒng)Signal generator for LCD InspectionLCD檢查用信號發(fā)生器Auto Optical Inspection自動光學(xué)檢測儀Air Particle Counter空氣塵埃粒子測量儀Back

34、light tester背光源色度亮度測量儀Projector投影儀Microscope 顯微鏡Ionizer blower離子風(fēng)扇Surface resistance test kit（點檢）表面電阻測量儀Charged Plate Monitor平面帶電測試儀Static electricity voltage testing 靜電電壓測量儀TEST測試ADI-AOI顯影后檢測AEI-AOI刻蝕后檢測CF-AOI彩色濾光片檢測Array Tester陣列電測機Open/Short tester and prober開路/短路檢測和探針系統(tǒng)ARRAY O/S probe開路/短路探針系統(tǒng)TE

35、G ProberTEG探針系統(tǒng)TEG TesterTEG測試系統(tǒng)Probe Unit for TEGTEG測試用探針系統(tǒng)Array repair激光修補系統(tǒng)Array Probe frame陣列電測架Visual test probe unit目測用探針系統(tǒng)ET Probe unit2英寸電測用探針系統(tǒng)Microscope顯微鏡（Panel）Microscope and laser system帶激光的顯微鏡 Barcode Reader條形碼閱讀器Fixed 2D Code Reader 2維讀碼器系統(tǒng)(固定類型)Portable 2D Code Reader 2維讀碼器系統(tǒng)(可移動類型)P

36、I+Macro inspection systemPI+Macro檢測系統(tǒng)Cell Gap Measure System盒厚測量系統(tǒng)Laser Trimmer激光切線系統(tǒng)Cell Laser Repair液晶盒激光修補系統(tǒng)Oscilloscope示波器Manual probe手動探針系統(tǒng)Precision Parameter AnalyzerTFT參數(shù)分析儀R&D研發(fā)Product Optical Quality Measurement System產(chǎn)品光學(xué)質(zhì)量檢測系統(tǒng)Optical Parameters Measurement System光學(xué)特性量測設(shè)備Circuit drawin

37、g/Orcad電路圖編輯器P-spice Analog SimulationP-spice電路仿真器PCB ArtworkPCB線路圖編輯器3D Mechanical Design Tool3D機械設(shè)計工具2D structure Design Tool2D結(jié)構(gòu)設(shè)計工具Pattern Generator測試圖形發(fā)生器Resistance Attenuator電阻衰減器illuminance Colorimeter亮度色度計Spectrophotometer亮度色度光譜儀Color Analyzer色彩分析儀R,L,C MeasurementR,L,C測試儀ESD Gun(EMI/EMS)tab

38、le靜電槍臺UV TEST chamber紫外線測試箱Seal dispenser邊框膠涂布機three axis Measurement Stage三軸量測平臺Pre-tilt angle & cell gap measurement system傾斜角盒厚量測儀LC resistivity meter液晶電阻率測量儀Oscilloscope(Analog)模擬示波器Thermo-hygrostat恒溫恒濕柜Thermal Shock Chamber冷熱沖擊艙ESD Gun(EMI/EMS)靜電槍Liquid crystal injection machine灌晶機Plasma cl

39、eaning machine等離子清洗機Simulation software of LCD Optical parametersLCD光學(xué)特性模擬軟件Layout editor for mask版圖設(shè)計軟件CIM集成控制CIM System-.Manufacturing Execution System(MES)-.Preventive Maintenance System(PMS)-.Statistical Process Control(SPC)-.Equipment Automation Program(EAP)-.Report System-.Engineering Data Ana

40、lysis(EDA)-.Finished Goods Management System(FGMS)-.Engineering Data Base(EDB)計算機集成制造系統(tǒng)-.制造執(zhí)行系統(tǒng)-.機臺預(yù)防保養(yǎng)系統(tǒng)-.統(tǒng)計制程管制-.設(shè)備自動化-.報表系統(tǒng)-.工程數(shù)據(jù)分析-.產(chǎn)成品管理系統(tǒng)-.工程數(shù)據(jù)庫Operator Interface Client(OIC) 操作者界面FAB Monitoring Client(FMC) 工廠監(jiān)控系統(tǒng)Dispatcher(DSP)任務(wù)分配系統(tǒng)Fault Detection and Classification(FDC)缺陷檢查和分類系統(tǒng)Alarm Manage

41、ment System(AMS)機臺報警系統(tǒng)Real Time Analysis/Monitoring System(RTAMS)缺陷管理的實時監(jiān)控/分析系統(tǒng)System Management System(SMS)系統(tǒng)管理系統(tǒng)AMHS物料搬運Unpacking line-.Un packer-.Glass conveyor-.Initial Cleaner-.Un loader拆包線-.拆包機-.玻璃傳送帶-.預(yù)清洗-.下料機Cassette Manual Guide Vehicle (MGV)工裝籃人工引導(dǎo)車Array CassetteArray工裝籃ODF CassetteODF工裝籃A

42、utomated Material Handling System(AMHS)-.Clean Stocker(STK)-.Overhead Handling System (OHS)-.Material Control System (MCS)自動物料搬運系統(tǒng)-.潔凈堆料機（STK）-.天車搬送系統(tǒng)（OHS）-.物料控制系統(tǒng)（MCS）Clean Robot潔凈機械手Loader/Un loader上下料機Sorter分片機CIM Server集成控制系統(tǒng)服務(wù)器MES DB ServerMES 數(shù)據(jù)服務(wù)器MES APP ServerMES 應(yīng)用服務(wù)器EDA/EDB ServerEDA/EDB 服

43、務(wù)器FDC ServerFDC服務(wù)器PMS ServerPMS服務(wù)器YMS ServerYMS服務(wù)器File Server文件服務(wù)器Centralized Backup/Recovery Server中央備份服務(wù)器Development Server開發(fā)服務(wù)器Testing Server測試服務(wù)器Storage/Disk Array磁盤陣列SAN Switch/Storage LinkSAN交換機Tape Library磁帶庫Switch網(wǎng)絡(luò)交換機Router網(wǎng)絡(luò)路由器Firewall網(wǎng)路防火墻Message Bus信息總線TIBCO Rendezvous TIBCO消息集聚器Data Pro

44、tector數(shù)據(jù)保護者Facility工程Exhaust Fan(FRP)排氣風(fēng)機（玻璃鋼離心式）UPW system純水超純水設(shè)備Auto control system自動控制系統(tǒng)CDA system壓縮空氣系統(tǒng)Bulk gas supply system大宗氣體供應(yīng)系統(tǒng)Exhaust Fan排氣風(fēng)機Fan Filter Unit送風(fēng)過濾系統(tǒng)Gas and liquid leak detection system氣體和液體測漏系統(tǒng)Diesel oil generator柴油發(fā)電機系統(tǒng)VOC scrubber有機物蒸氣洗凈機Plant Vacuum pump工廠真空系統(tǒng)cleaning vac

45、uum pump清潔真空系統(tǒng)waste water monitor system廢水檢測系統(tǒng)vesda system空氣煙感探測分析系統(tǒng)chiller冷水機組cooling tower冷卻塔HVAC PUMP空調(diào)水泵heat energy supply system集中供熱系統(tǒng)LPG systemLPG站系統(tǒng)PCW systemPCW系統(tǒng)35KV transformer35KV變壓器Telephone system電話系統(tǒng)CATV system有線電視系統(tǒng)broadcasting system廣播系統(tǒng)fire alarm system火警系統(tǒng)WWT廢水處理系統(tǒng)35KV switch devic

46、e35KV開關(guān)裝置Mv switchgears, cast coil transformers, unit substations, power scada中壓變配電系統(tǒng)Security & CCTV system安保和閉路電視系統(tǒng)Fire fighting system消防系統(tǒng)Analysis room分析室Single head scriber單刀頭切割機Contact Angle接觸角測量儀Eyewash洗眼臺Wet station帶通風(fēng)櫥的中央實驗臺四TFT生產(chǎn)常用中英文名稱English name中文名稱General一般專有名詞LCD (Liquid Crystal Dis

47、play)液晶顯示器Glass, substrate or glass substrate玻璃基版TFT(Thin Film Transistor)薄膜晶體管Panel面板Array陣列Cell液晶盒Module模塊Monitor監(jiān)視器Pixel 像素Computer電腦NotebookPC筆記本電腦（簡稱為NB）RGB (Red, Green, Blue)指紅綠藍三基色PM (Preventive Maintenance)預(yù)防保養(yǎng)Quality品質(zhì)Standard標(biāo)準(zhǔn) (指作業(yè)標(biāo)準(zhǔn)或質(zhì)量指針)Material材料Yield良率CIM (Computer Integration Manufac

48、turing)計算機集成制造（指以計算機系統(tǒng)整合制造流程）FA (Factory Automation)工廠自動化Exit出口Precaution注意Warning警告Emergency緊急Alarm警報Clean Room 潔凈室Clean room潔凈室HEPA (High Efficient Particulate Air) filter高效能粒子空氣過濾網(wǎng)Contamination污染Temperature (TEMP)溫度Humidity濕度Pressure壓力UPW (Ultra-Pure Water)超純水DIW (De-Ionized Water)去離子水IPA (Isopropyl Alcohol)異丙醇Sticky mat粘塵墊Cleanliness潔凈度ESD (Electro-static Discharge)靜電放電Laminar flow層流（流體力學(xué)名詞）Turbulent flow擾流（流體力學(xué)名詞）Alcohol酒精Acetone丙酮Particle微粒子Dust灰塵Gowni