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二維MoS2薄膜的可控制備及其電子輸運(yùn)特性研究【摘要】
二維MoS2作為一種新型半導(dǎo)體材料,在電子學(xué)和光電子學(xué)領(lǐng)域具有廣泛的應(yīng)用前景。在本文研究中,我們采用化學(xué)氣相沉積(CVD)技術(shù)在氧化硅基底上制備了高質(zhì)量的二維MoS2薄膜,并通過壓電傳感器進(jìn)行了表征。通過在不同條件下控制CVD過程中的溫度、氣體流量和反應(yīng)時(shí)間等參數(shù),成功地實(shí)現(xiàn)了對MoS2薄膜的可控制備。同時(shí),利用離子束雕刻技術(shù)對MoS2薄膜進(jìn)行了納米加工,使其形成了具有排列有序的長條紋的結(jié)構(gòu),可作為電極進(jìn)行電子輸運(yùn)特性研究。
進(jìn)一步的電子輸運(yùn)實(shí)驗(yàn)表明,MoS2薄膜具有半導(dǎo)體特性,并在室溫下呈現(xiàn)出n型導(dǎo)電性。在不同溫度和電場的情況下,MoS2薄膜的電子輸運(yùn)性質(zhì)表現(xiàn)出明顯的變化。通過調(diào)控材料的缺陷和摻雜,成功地實(shí)現(xiàn)了對MoS2薄膜電子輸運(yùn)特性的調(diào)控。結(jié)果表明,MoS2薄膜在電子學(xué)和光電子學(xué)器件中具有廣泛的應(yīng)用前途。
【關(guān)鍵詞】
二維MoS2;CVD;可控制備;納米加工;電子輸運(yùn)特性
【Abstract】
Two-dimensional(2D)MoS2asanovelsemiconductormaterialhasgreatpotentialapplicationsinthefieldsofelectronicsandoptoelectronics.Inthisstudy,high-quality2DMoS2filmwaspreparedonaSiO2substratebychemicalvapordeposition(CVD)techniqueandcharacterizedbypiezoelectricsensors.ThecontrollablepreparationofMoS2filmwasachievedbycontrollingthetemperature,gasflowrate,andreactiontimeintheCVDprocessunderdifferentconditions.Meanwhile,theMoS2filmwaspatternedbyionbeametching,formingastructurewithalongitudinallyalignedstripethatwasusedasanelectrodeforthestudyofelectronictransportcharacteristics.
FurtherelectronictransportexperimentsdemonstratedthattheMoS2filmexhibitedsemiconductorpropertiesandshowedann-typeconductivityatroomtemperature.TheelectronictransportpropertiesofMoS2filmshowedsignificantchangesunderdifferenttemperaturesandelectricfields.Bycontrollingthematerialdefectsanddoping,theelectronictransportcharacteristicsofMoS2filmweresuccessfullyregulated.TheresultsindicatedthatMoS2filmhadgreatpotentialapplicationsinelectronicsandoptoelectronicsdevices.
【Keywords】
Two-dimensionalMoS2;CVD;Controllablepreparation;Nanofabrication;ElectronictransportcharacteristicTwo-dimensionalMoS2hasattractedincreasingattentioninrecentyearsduetoitsuniquepropertiesandpotentialapplicationsinelectronicsandoptoelectronicsdevices.Inordertofullyutilizeitspotential,thecontrollablepreparationofhigh-qualityMoS2filmiscrucial.
OneofthemostcommonlyusedmethodsforpreparingMoS2filmischemicalvapordeposition(CVD).Bycontrollingthegrowthconditions,suchastemperature,pressure,andprecursorconcentration,high-qualityMoS2filmwithuniformthicknessandlargeareacanbeobtained.
TheelectronictransportpropertiesofMoS2filmarestronglydependentonitscrystalquality,defectdensity,anddopinglevel.IthasbeenfoundthattheelectronictransportpropertiesofMoS2filmcanbesignificantlyimprovedbyreducingthedefectdensityanddopingwithcertainimpurities.
Underdifferenttemperaturesandelectricfields,theelectronictransportpropertiesofMoS2filmexhibitsignificantchanges.Forinstance,theelectricalconductivityofMoS2filmcanincreasewithincreasingtemperatureorelectricfieldduetotheenhancedcarriermobility.Furthermore,theconductivitycanalsobetunedbycontrollingthedopinglevel,ascertaindopantscaneitherenhanceorsuppressthecarrierconcentration.
Insummary,thecontrollablepreparationandregulationofelectronictransportcharacteristicsofMoS2filmprovideopportunitiesforitspotentialapplicationsinfutureelectronicandoptoelectronicsdevices.ThenanofabricationofMoS2-baseddeviceswithhighperformanceandreliabilitycanbeachievedwiththeadvancementofthesynthesisandcharacterizationtechniquesApartfromelectronicandoptoelectronicapplications,MoS2filmsalsohavepotentialinotherfieldssuchasenergystorageandcatalysis.Oneofthemostpromisingapplicationsisinsupercapacitors,whichareenergystoragedeviceswithhighpowerdensityandfastcharginganddischargingcapabilities.MoS2hasbeenexploredasanelectrodematerialforsupercapacitorsduetoitslargesurfacearea,highelectricalconductivity,andgoodstability.ResearchershavereportedthatMoS2-basedsupercapacitorsexhibitexcellentelectrochemicalperformance,whichcanbefurtherimprovedbytuningthemorphologyandstructureofthematerial.
MoS2-basedcatalystshavealsoattractedmuchattentioninrecentyearsduetotheirhighcatalyticactivityandselectivityinvariouschemicalreactions.Forinstance,MoS2hasbeenreportedtobeanefficientcatalystforthehydrogenevolutionreaction(HER),whichisakeystepinwater-splittingtechnologiesfortheproductionofhydrogenfuel.ThehighcatalyticactivityofMoS2forHERcanbeattributedtoitsuniqueelectronicandgeometricstructures,aswellasthesynergisticeffectbetweentheactivesitesandthesupportmaterial.
Inaddition,MoS2canalsobeusedasacatalystforotherreactionssuchashydrodesulfurization(HDS)andoxygenreductionreaction(ORR),whichareimportantprocessesinthepetrochemicalindustryandfuelcells,respectively.ThecatalyticperformanceofMoS2canbefurtherenhancedbymodifyingitssurfacechemistry,morphology,andstructurethroughvariousmethodssuchasdoping,surfacefunctionalization,andnanostructuring.
Overall,thecontrollablepreparationandregulationofMoS2filmsoffergreatopportunitiesfortheirapplicationsinvariousfields.Withthecontinuousdevelopmentofsynthesisandcharacterizationtechniques,aswellastheincreasingunderstandingofthefundamentalpropertiesandbehaviorsofMoS2,wecanexpectmorebreakthroughsinthedesignandfabricationofadvancedMoS2-basedmaterialsanddevicesinthefutureOnepromisingapplicationofMoS2isinoptoelectronics.Duetoitsdirectbandgapnatureandstronglight-matterinteraction,MoS2hasbeendemonstratedtohaveexcellentperformanceasaphotoelectricmaterial,makingitanidealcandidateforsolarcellsandphotodetectors.Additionally,MoS2-basedlight-emittingdiodes(LEDs)haveshownpromisingperformanceintermsofbrightnessandefficiency,andcouldpotentiallybeintegratedwithelectronicdevicesforoptoelectronicapplications.
AnotherpotentialapplicationofMoS2isinenergystoragedevices,suchasbatteriesandsupercapacitors.MoS2hasbeenshowntohaveahighspecificcapacitanceandexcellentcyclingstability,makingitanattractiveelectrodematerialforsupercapacitors.Inaddition,MoS2hasbeenusedasacathodematerialinlithium-ionbatteries,withpromisingresultsintermsofbothcapacityandcyclelife.FurtherresearchisneededtofullyrealizethepotentialofMoS2inenergystorageapplications,butthematerial'suniquepropertiesmakeitapromisingcandidateforfuturedevelopments.
Inthefieldofcatalysis,MoS2hasshowngreatpotentialduetoitshighsurfacearea,abundance,anduniqueelectronicandchemicalproperties.MoS2-basedcatalystshavebeenusedinvariousapplications,suchaselectrocatalysis,photocatalysis,andhydrogenevolutionreactions.Additionally,MoS2-basedcatalystshaveshownpromisingactivityforconversionofgreenhousegases,suchascarbondioxide,intovaluablechemicals,makingthemapotentiallyimportanttoolforaddressingclimatechange.
Overall,theuniquepropertiesandversatileapplicationsofMoS2makeitanexcitingmaterialforresearchanddevelopmentinvariousfields.AstheunderstandingofMoS2continuestogrow,wecanexpecttoseemoreadvancesinthedesignandfabricationofadvancedmaterialsanddevices.Thedevelopmentofnewsynthesi
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