先進(jìn)制造技術(shù)的新發(fā)展@中英文翻譯@外文翻譯

外文原文： The new advanced manufacturing technology development Abstract : This paper has presented the problems facing todays manufacturing technology, advanced manufacturing discussed in the forefront of science, and a vision for the future development of advanced manufacturing technology. Keyword： Advanced manufacturing technologies； Frontier science； Applications prospects Modern manufacturing is an important pillar of the national economy and overall national strength and its GDP accounted for a general national GDP 20%55%. In the composition of a countrys business productivity, manufacturing technology around 60% of the general role. Experts believe that the various countries in the world economic competition, mainly manufacturing technology competition. Their competitiveness in the production of the final product market share. With the rapid economic and technological development and customer needs and the changing market environment, this competition is becoming increasingly fierce, and that Governments attach great importance to the advanced manufacturing technology research. 1 .Current manufacturing science to solve problems Manufacturing science to solve the current problems focused on the following aspects : (1) Manufacturing systems is a complex systems, and manufacturing systems to meet both agility, rapid response and rapid reorganization of the capacity to learn from the information science, life science and social science interdisciplinary research, and explore new manufacturing system architecture, manufacturing models and manufacturing systems effective operational mechanism. Manufacturing systems optimized organizational structure and good performance is manufacturing system modelling, simulation and optimization of the main objectives. Manufacturing system architecture not only to create new enterprises both agility and responsiveness to the needs and the ability to reorganize significance, but also for the soft production equipment manufacturing enterprises bottom reorganization and dynamic capacity to set higher demands. Biological manufacturing outlook increasingly being introduced to the system to meet new demands manufacturing systems. (2) The rapid rise in support of manufacturing, geometric knowledge sharing has become a modern manufacturing constraints, product development and manufacturing technologies of the key issues. For example, in computer-aided design and manufacturing (CAD/CAM) integration, coordinates measurements (CMM) and robotics fields, in 3D real space (3-Real Space), there are a lot of geometric algorithm design and analysis, especially the geometric said, geometric calculation and geometric reasoning； In measurement and robot path planning and parts search spaces (such as Localization), the existence of space C- interspace (configuration space Configuration Space) geometric calculation and geometric reasoning； Objects in operation (rescue, paying and assembly, etc.) means paying more description and robot planning, campaign planning and assembly operations planning is needed in the types of space (Screw Space) geometric reasoning. Manufacturing process of physical and geometric mechanics phenomenon of scientific research to create a geometric calculation and geometric reasoning, and other aspects of the research top ic, the theory pending further breakthrough, the new one door disciplines - computer geometric are being increasingly broad and in-depth study. (3) In the modern manufacturing process, information not only manufacturing industries have become dominated the decisive factor, but also the most active ones. Manufacturing information systems to improve throughput of modern manufacturing has become a focus of scientific development. The manufacturing information system organization and structure required to create information access, integration and integration show three-dimensional in nature, measuring the multidimensional nature of the information, and information organizations nature. Information structure models in the manufacturing, manufacturing information consistency constraint, and the dissemination of data processing and the manufacture of enormous knowledge base management, and other areas, there is a need to further breakthroughs. (4) The calculation of the wisdom of artificial intelligence tools and methods in the manufacture of a wide range of applications for manufacturing smart development. Category based on the calculation of biological evolution algorithms smart tools, including activation issues optimize GPS technology portfolio by growing concern is in the manufacture of the complete portfolio optimization problems combined speed and precision of GPS issues both in size constraints. Manufacturing wisdom manifested in the following aspects : wisdom activation, wisdom design, intelligent processing, robotics, intelligent control, intelligent process planning, smart diagnostic, and other aspects. These innovative products are the key theoretical issues, but also by creating a door for a science skills in the important basic issues. The focus in these issues, we can form the basis of product innovation research system. 2. Modern mechanical engineering at the frontiers of science Cross-integration between the different science will produce new scientific gathering, economic development and social progress of science and technology created new demands and expectations, thus creating a frontier science. Frontier science is settled and unsettled issues between the scientific community. Frontier science, with a clear domain, and dynamic character of the area. Works frontier science from the general basic science is an important characteristic of the actual works, it covers the key emerging science and technology issues. Ultrasonic electrical, ultra-high-speed machines, green design and manufacturing, and other fields, and has done a lot of research work, but innovation is the key question is not clear mechanical science. Large complex mechanical system design and performance optimization of product innovation design, smart structures and systems, intelligent robots and their dynamics, nano Mocaxue, manufacturing process 3D numerical simulations and physical simulation, precision and ultra-fine processing technology key basis, about 10 mega large and sophisticated equipment design and manufacturing base, virtual manufacturing and virtual instruments, nanometer measurement and instrumentation, parallel connection axis machine tools, and although the field of micro-electromechanical systems have done a lot of research, but there are still many key science and technology issues to be resolved. Information science, nano science, materials science, life science, management science and manufacturing science of the 21st century will be to change the mainstream science, and the resulting high-tech industry will change the face of the world. Therefore, the above areas of cross-development manufacturing systems and manufacturing informatics, nano manufacturing machinery and nano science, better machinery and better manufacturing science, management science and manufacturing systems will be critical to the 21st century mechanical engineering science is important frontier science. 2.1 Manufacturing science and information science cross - manufacturing informatics Mechanical and electrical products, chemical raw materials in the information. Many modern value added products primarily reflected in the information. Thus the manufacturing process for the acquisition and application of information is very important. Information science and technology is to create an important symbol of globalization and modernization. While the manufacturing technology began to explore product design and manufacturing processes, the nature of the information, on the other hand, to create technology to transform itself to adapt to the new information makes its manufacturing environment. Along with the manufacturing process and manufacturing systems to deepen understanding, researchers are trying to new concepts and approaches to their description and expression to achieve further co ntrol and optimization purposes. And manufacturing-related information mainly product information, technical information and information management in this area following major research direction and content : (1) manufacturing information acquisition, processing, storage, transmission and application of knowledge to create information and decision-making transformation. (2) Non-symbols expressing information, manufacturing information enables transmission, manufacturing information management, manufacturing information integrity in a state of non-production decision-making, management of virtual manufacturing, based on the network environment of the design and manufacturing, manufacturing process control and manufacturing systems science. These eleme nts are manufactured in science and the scientific basis for the integration of product information, constitute the manufacture of the new branch of science - to create informatics. 2.2 Micro mechanical and manufacturing technology research Micro-electronic mechanical systems (MEMS) refers to the collection of micro-sensors, micro-devices and the implementation of signal processing and control circuits, interface circuits, communications and power with the integration of micro-electromechanical system integrity. MEMS technology objectives through system miniaturization, to explore a new theory of integration, new functional components and systems. MEMS development will greatly facilitate the pocket of various products, miniaturization, a number of devices and systems to enhance the level of functional density, information density and Internet density, significantly saving, thin section. Not only can it reduce the cost of mechanical and electrical systems, but also to be completed and the size of many large systems impossible task. For example, using sophisticated 5m diameter micro tweezers walls are made of a red blood cell can； Created to keep the cars 3mm size； In the magnetic field, like butterflies flying size aircraft. MEMS technology has opened up a completely new technology areas and industries, with many traditional sensors incomparable advantages in manufacturing, aerospace, transportation, telecommunications, agriculture, biomedical, environmental monitoring, military, families, and access to almost all areas have very broad application prospects. Micro machinery is machinery and electronic technology in nano-scale technology integration photogenic product. Back in 1959 scientists have raised the idea of micro-mechanical and micro-1962, the first silicon pressure sensors. 1987 California University of California Berkeley developed rotor diameter of the silicon micro-60120 16ug m electrostatic electric motors, show produced using silicon micro-machining small movable structures and compatible with IC manufacturing micro system potential. Micro-mechanical technology might like 20th century microelectronics technology, the technology of the world in the 21st century, economic development and national defense building a tremendous impact. Over the past 10 years, the development of micro-mechanical spectacular. Its characteristics are as follows : a considerable number of micro-components (micro structure, the implementation of micro-sensors and micro-machines, etc.) and micro-systems research success reflects the current and potential applications of value； The development of micro-manufacturing technology, particularly semiconductor processing technology have become small micro systems support technology； micro-electromechanical systems research needs of the interdisciplinary research team, micro-electromechanical systems technology in the development of microelectronics technology on the basis of multidisciplinary cross-frontier area of research, involving electronic engineering, mechanical engineering, materials engineering, physics, chemistry and biomedical engineering and other technical and scientific. The current micro-mechanical systems under the conditions of the campaign laws, the physical characteristics and micro components of the role of the mechanics payload acts lack adequate understanding is not yet in a theoretical basis for a micro-system design theory and methodology, and therefore can By experience and test methods research. Micro-mechanical systems, the existence of key scientific research issues of micro-scale system effects, physical properties and biochemical characteristics. Micro-system research are in the eve of a breakthrough, which is the in-depth study of the area. 2.3 Material produced / manufactured parts integration of new technologies for processing. Material is a milestone in the progress of mankind, is the manufacturing and high-tech development. Every important to the success of the production and application of new materials, will promote the material and the promotion of national economic strength and military strength. 21, the world will be resource consumption-based economy to a knowledge-based industrial transformation for materials and parts and functions of a high performance, intelligent features； Req uest materials and components designed to achieve quantitative-based and digitized； Prepare materials and components for the rapid, efficient and achieve both integration and integrated. Digital materials and components designed to be a simulation and optimization of materials and components to achieve high quality production / manufacturing and other integration, integrated manufacturing key. On the one hand, to be completed through computer simulation optimization can reduce the material is produced in the course of manufacture of spare parts and experimental links to the best craft programmes, materials and components to achieve high quality production / manufacturing； On the other hand, according to the requirements of different material properties, such as flexible modules volume, thermal expansion coefficient, magnetic performance, Research materials and components designed form. And the removal of traditional materials-manufacturing technology, and increase the level of information technology, the research group of synthetic materials is a process technology. Forming materials and components manufacture digital theory, technology and methods, such as rapid adoption of emerging technologies material growing principles, a breakthrough in the traditional law and to build law mechanical deformation processing many restrictions, no processing tools or dies, can rapidly create arbitrary complex shape and has a certain function 3D models or entity parts. 2.4 machinery manufacturing breakthrough The 21st century will be the century of life science, mechanical and life sciences depth integration will generate new concept products (such as better intelligence structure), to develop a new process (such as the growth processes shape) and the opening of new industries and to resolve product design, manufacturing processes and systems provide a series of problems new solutions. This is a highly innovative and leading edge area in the challenge. Earths biological evolution in the long accumulated fine qualities of human manufacturing activities to address the various problems with examples and guidelines. Learning from life phenomena organizations operating complex systems and methods and techniques, manufacturing is the future solution to the current problems facing many an efficient way. Better manufacturing refers to the replication of biological organs from organizations, since healing, self growth and evolution since the function of the model structure and operation of a manufacturing system and manufacturing process. If the manufacturing process mechanization, automation extends human physical and intelligent extension of the human intellectual, then create better may be said to extend its own organizational structure and human evolution process. Gene involved in the manufacture of biological science is the self-organization mechanism and its application in manufacturing systems. The so-called self-organization refers to a system in its internal mechanism driven by the organizational structure and operation mode learning, thereby enhancing the capacity for environmental adaptation process. Create better since the organization bottom-up mechanism for parallel product design and manufacturing processes of automatic generation, the dynamics of production systems and manufacturing systems and products more automatic a theoretical foundation and achieve superior conditions. Create a better manufacturing and life sciences far edge hybrid of the 21st century manufacturing will have an enormous impact. Create better research content is twofold : 2.4.1 To create better lives Research lives of the general phenomenon of the law and models, such as artificial life, cellular automatic machines, biological information processing skills, biological wisdom, biological-based organizational structure and mode of operation and the evolution of biological mechanisms and getting better； 2.4.2 Oriented manufacturing breakthrough manufacturing Research organizations better manufacturing systems since the mechanisms and methods, for example : based on full information-sharing breakthrough design principles, multi-discipline modules based on the distributed control and coordination mechanism based on the evolution of an excellent strategy； Study the concept of creating better system and its basis, such as : the formalization described space and better information shine upon relations better system and its evolution of complexity measurement methods. Machinery manufacturing is better and better mechanical science and life science, information science, materials science disciplines such as high integration, the study includes growth formative processes, better design and manufacturing systems, mechanical and biological wisdom better shape manufacturing. Currently doing research mostly forward exploratory work, with distinct characteristics of the basic research, if the research continues to seize opportunities that might arise revolutionary breakthroughs. Future research should concern areas of biological processing technology, better manufacturing system, based on rapid prototype manufacturing engineering technology organizations, as well as biological engineering related key technical basis. 3. Modern manufacturing technology trends Since the beginning of the 1990s, the nations of the world have manufacturing technology research and development as a national priority for the development of key technologies, such as the United States advanced manufacturing technology plan AMTP, Japan wisdom manufacturing technology (IMS) international cooperation schemes, Korea senior national plan of modern technology (G-7), Germany plans to manufacture 2000 and the EC Esprit and BRITE-EURAM plan. With the electronics, information, the constant development of new and high technologies, market demand individuality and diversity, the future of modern manufacturing technology to the overall development trends of the sophisticated, flexible, and networked, virtual and intelligent, green integrated, globalization direction. Current trends in modern manufacturing technology has the following nine areas : (1) Information technology, management techniques and technology closely integrated technology, modern production model will be continuous development. (2) Design techniques and more modern means. (3) Shaped and manufacture of sophisticated technology and manufacturing processes to achieve longer. (4) The formation of new special processing methods. (5) Development of a new generation of ultra-sophisticated, ultra-high-speed manufacturing equipment. (6) Machining skills development for the engineering sciences. (7) Implementation of clean green manufacturing. (8)The widespread application of virtual reality technology to the manufacturing sector. (9) To create people-oriented. 譯文： 先進(jìn)制造技術(shù)的新發(fā)展 摘要 ： 本文介紹了當(dāng)今制造技術(shù)面臨的問(wèn)題，論述了先進(jìn)制造的前沿科學(xué)，并展望了先進(jìn)制造技術(shù)的發(fā)展前景。 關(guān)鍵詞 ：?jiǎn)栴}； 先進(jìn)制造技術(shù)； 前沿科學(xué)； 應(yīng)用前景 制造業(yè)是現(xiàn)代國(guó)民經(jīng)濟(jì)和綜合國(guó)力的重要支柱，其生產(chǎn)總值一般占一個(gè)國(guó)家國(guó)內(nèi)生產(chǎn)總值的 20%55%。在一個(gè)國(guó)家的企業(yè)生產(chǎn)力構(gòu)成中，制造技術(shù)的作用一般占 60%左右。專(zhuān)家認(rèn)為，世界上各個(gè)國(guó)家經(jīng)濟(jì)的競(jìng)爭(zhēng)， 主要是制造技術(shù)的競(jìng)爭(zhēng)。其競(jìng)爭(zhēng)能力最終體現(xiàn)在所生產(chǎn)的產(chǎn)品的市場(chǎng)占有率上。隨著經(jīng)濟(jì)技術(shù)的高速發(fā)展以及顧客需求和市場(chǎng)環(huán)境的不斷變化，這種競(jìng)爭(zhēng)日趨激烈，因而各國(guó)政府都非常重視對(duì)先進(jìn)制造技術(shù)的研究。 1. 當(dāng)前制造科學(xué)要解決的問(wèn)題 當(dāng)前制造科學(xué)要解決的問(wèn)題主要集中在以下幾方面： （ 1）制造系統(tǒng)是一個(gè)復(fù)雜的大系統(tǒng)，為滿(mǎn)足制造系統(tǒng)敏捷性、快速響應(yīng)和快速重組的能力，必須借鑒信息科學(xué)、生命科學(xué)和社會(huì)科學(xué)等多學(xué)科的研究成果，探索制造系統(tǒng)新的體系結(jié)構(gòu)、制造模式和制造系統(tǒng)有效的運(yùn)行機(jī)制。制造系統(tǒng)優(yōu)化的組織結(jié)構(gòu)和良好的運(yùn)行 狀況是制造系統(tǒng)建模、仿真和優(yōu)化的主要目標(biāo)。制造系統(tǒng)新的體系結(jié)構(gòu)不僅對(duì)制造企業(yè)的敏捷性和對(duì)需求的響應(yīng)能力及可重組能力有重要意義，而且對(duì)制造企業(yè)底層生產(chǎn)設(shè)備的柔性和可動(dòng)態(tài)重組能力提出了更高的要求。生物制造觀越來(lái)越多地被引入制造系統(tǒng)，以滿(mǎn)足制造系統(tǒng)新的要求。 （ 2）為支持快速敏捷制造，幾何知識(shí)的共享已成為制約現(xiàn)代制造技術(shù)中產(chǎn)品開(kāi)發(fā)和制造的關(guān)鍵問(wèn)題。例如在計(jì)算機(jī)輔助設(shè)計(jì)與制造 (CAD CAM)集成、坐標(biāo)測(cè)量 (CMM)和機(jī)器人學(xué)等方面，在三維現(xiàn)實(shí)空間 (3-Real Space)中，都存在大量的幾何算法設(shè)計(jì)和分析等問(wèn) 題，特別是其中的幾何表示、幾何計(jì)算和幾何推理問(wèn)題；在測(cè)量和機(jī)器人路徑規(guī)劃及零件的尋位 (如 Localization)等方面，存在 C-空間 (配置空間 Configuration Space)的幾何計(jì)算和幾何推理問(wèn)題；在物體操作 (夾持、抓取和裝配等 )描述和機(jī)器人多指抓取規(guī)劃、裝配運(yùn)動(dòng)規(guī)劃和操作規(guī)劃方面則需要在旋量空間 (Screw Space)進(jìn)行幾何推理。制造過(guò)程中物理和力學(xué)現(xiàn)象的幾何化研究形成了制造科學(xué)中幾何計(jì)算和幾何推理等多方面的研究課題，其理論有待進(jìn)一步突破，當(dāng)前一門(mén)新學(xué)科 -計(jì)算機(jī)幾何正在受到日益廣泛和深入 的研究。 （ 3）在現(xiàn)代制造過(guò)程中，信息不僅已成為主宰制造產(chǎn)業(yè)的決定性因素，而且還是最活躍的驅(qū)動(dòng)因素。提高制造系統(tǒng)的信息處理能力已成為現(xiàn)代制造科學(xué)發(fā)展的一個(gè)重點(diǎn)。由于制造系統(tǒng)信息組織和結(jié)構(gòu)的多層次性，制造信息的獲取、集成與融合呈現(xiàn)出立體性、信息度量的多維性、以及信息組織的多層次性。在制造信息的結(jié)構(gòu)模型、制造信息的一致性約束、傳播處理和海量數(shù)據(jù)的制造知識(shí)庫(kù)管理等方面，都還有待進(jìn)一步突破。 （ 4）各種人工智能工具和計(jì)算智能方法在制造中的廣泛應(yīng)用促進(jìn)了制造智能的發(fā)展。一類(lèi)基于生物進(jìn)化算法的計(jì)算智能工具，在包括調(diào)度問(wèn) 題在內(nèi)的組合優(yōu)化求解技術(shù)領(lǐng)域中，受到越來(lái)越普遍的關(guān)注，有望在制造中完成組合優(yōu)化問(wèn)題時(shí)的求解速度和求解精度方面雙雙突破問(wèn)題規(guī)模的制約。制造智能還表現(xiàn)在：智能調(diào)度、智能設(shè)計(jì)、智能加工、機(jī)器人學(xué)、智能控制、智能工藝規(guī)劃、智能診斷等多方面。 這些問(wèn)題是當(dāng)前產(chǎn)品創(chuàng)新的關(guān)鍵理論問(wèn)題，也是制造由一門(mén)技藝上升為一門(mén)科學(xué)的重要基礎(chǔ)性問(wèn)題。這些問(wèn)題的重點(diǎn)突破，可以形成產(chǎn)品創(chuàng)新的基礎(chǔ)研究體系。 2 .現(xiàn)代機(jī)械工程的前沿科學(xué) 不同科學(xué)之間的交叉融合將產(chǎn)生新的科學(xué)聚集，經(jīng)濟(jì)的發(fā)展和社會(huì)的進(jìn)步對(duì)科學(xué)技術(shù)產(chǎn)生了新的要求和 期望，從而形成前沿科學(xué)。前沿科學(xué)也就是已解決的和未解決的科學(xué)問(wèn)題之間的界域。前沿科學(xué)具有明顯的時(shí)域、領(lǐng)域和動(dòng)態(tài)特性。工程前沿科學(xué)區(qū)別于一般基礎(chǔ)科學(xué)的重要特征是它涵蓋了工程實(shí)際中出現(xiàn)的關(guān)鍵科學(xué)技術(shù)問(wèn)題。超聲電機(jī)、超高速切削、綠色設(shè)計(jì)與制造等領(lǐng)域，國(guó)內(nèi)外已經(jīng)做了大量的研究工作，但創(chuàng)新的關(guān)鍵是機(jī)械科學(xué)問(wèn)題還不明朗。大型復(fù)雜機(jī)械系統(tǒng)的性能優(yōu)化設(shè)計(jì)和產(chǎn)品創(chuàng)新設(shè)計(jì)、智能結(jié)構(gòu)和系統(tǒng)、智能機(jī)器人及其動(dòng)力學(xué)、納米摩擦學(xué)、制造過(guò)程的三維數(shù)值模擬和物理模擬、超精度和微細(xì)加工關(guān)鍵工藝基礎(chǔ)、大型和超大型精密儀器裝備的設(shè)計(jì)和制造基礎(chǔ)、 虛擬制造和虛擬儀器、納米測(cè)量及儀器、并聯(lián)軸機(jī)床、微型機(jī)電系統(tǒng)等領(lǐng)域國(guó)內(nèi)外雖然已做了不少研究，但仍有許多關(guān)鍵科學(xué)技術(shù)問(wèn)題有待解決。 信息科學(xué)、納米科學(xué)、材料科學(xué)、生命科學(xué)、管理科學(xué)和制造科學(xué)將是改變21 世紀(jì)的主流科學(xué)，由此產(chǎn)生的高新技術(shù)及其產(chǎn)業(yè)將改變世界的面貌。因此，與以上領(lǐng)域相交叉發(fā)展的制造系統(tǒng)和制造信息學(xué)、納米機(jī)械和納米制造科學(xué)、仿生機(jī)械和仿生制造學(xué)、制造管理科學(xué)和可重構(gòu)制造系統(tǒng)等會(huì)是 21 世紀(jì)機(jī)械工程科學(xué)的重要前沿科學(xué)。 2.1 制造科學(xué)與信息科學(xué)的交叉 -制造信息科學(xué) 機(jī)電產(chǎn)品是信息在原 材料上的物化。許多現(xiàn)代產(chǎn)品的價(jià)值增值主要體現(xiàn)在信息上。因此制造過(guò)程中信息的獲取和應(yīng)用十分重要。信息化是制造科學(xué)技術(shù)走向全球化和現(xiàn)代化的重要標(biāo)志。人們一方面對(duì)制造技術(shù)開(kāi)始探索產(chǎn)品設(shè)計(jì)和制造過(guò)程中的信息本質(zhì)，另一方面對(duì)制造技術(shù)本身加以改造，以使得其適應(yīng)新的信息化制造環(huán)境。隨著對(duì)制造過(guò)程和制造系統(tǒng)認(rèn)識(shí)的加深，研究者們正試圖以全新的概念和方式對(duì)其加以描述和表達(dá)，以進(jìn)一步達(dá)到實(shí)現(xiàn)控制和優(yōu)化的目的。 與制造有關(guān)的信息主要有產(chǎn)品信息、工藝信息和管理信息，這一領(lǐng)域有如下主要研究方向和內(nèi)容： (1) 制造信息的獲取 、處理、存儲(chǔ)、傳遞和應(yīng)用，大量制造信息向知識(shí)和決策轉(zhuǎn)化。 (2) 非符號(hào)信息的表達(dá)、制造信息的保真?zhèn)鬟f、制造信息的管理、非完整制造信息狀態(tài)下的生產(chǎn)決策、虛擬管理制造、基于網(wǎng)絡(luò)環(huán)境下的設(shè)計(jì)和制造、制造過(guò)程和制造系統(tǒng)中的控制科學(xué)問(wèn)題。 這些內(nèi)容是制造科學(xué)和信息科學(xué)基礎(chǔ)融合的產(chǎn)物，構(gòu)成了制造科學(xué)中的新分支 -制造信息學(xué)。 2.2 微機(jī)械及其制造技術(shù)研究 微型電子機(jī)械系統(tǒng) (MEMS)，是指集微型傳感器、微型執(zhí)行器以及信號(hào)處理和控制電路、接口電路、通信和電源于一體的完整微型機(jī)電系統(tǒng)。 MEMS 技術(shù)的目標(biāo) 是通過(guò)系統(tǒng)的微型化、集成化來(lái)探索具有新原理、新功能的元件和系統(tǒng)。MEMS 的發(fā)展將極大地促進(jìn)各類(lèi)產(chǎn)品的袖珍化、微型化，成數(shù)量級(jí)的提高器件與系統(tǒng)的功能密度、信息密度與互聯(lián)密度，大幅度地節(jié)能、節(jié)材。它不僅可以降低機(jī)電系統(tǒng)的成本，而且還可以完成許多大尺寸機(jī)電系統(tǒng)無(wú)法完成的任務(wù)。例如用尖端直徑為 5m的微型鑷子可以?shī)A起一個(gè)紅細(xì)胞；制造出 3mm 大小能夠開(kāi)動(dòng)的小汽車(chē)；可以在磁場(chǎng)中飛行的像蝴蝶大小的飛機(jī)等。 MEMS 技術(shù)的發(fā)展開(kāi)辟了技術(shù)全新的領(lǐng)域和產(chǎn)業(yè)，具有許多傳統(tǒng)傳感器無(wú)法比擬的優(yōu)點(diǎn)，因此在制造業(yè)、航空、航天、交通、通信、 農(nóng)業(yè)、生物醫(yī)學(xué)、環(huán)境監(jiān)控、軍事、家庭以及幾乎人們接觸到的所有領(lǐng)域中都有著十分廣闊的應(yīng)用前景。 微機(jī)械是機(jī)械技術(shù)與電子技術(shù)在納米尺度上相融合的