半導(dǎo)體制程概論蕭宏chapter13

Chapter14

CMOS製程HongXiao,Ph.D.hxiao89@www2.austin.cc.tx.us/HongXiao/Book.htmHongXiao,Ph.D.1www2.austin.cc.tx.us/HongXiao/Book.htm目標列出1980至1990年代主要製程技術(shù)的改變解釋銅金屬化以及傳統(tǒng)金屬化之間的差異HongXiao,Ph.D.2www2.austin.cc.tx.us/HongXiao/Book.htm從1960s到1970s1960sPMOS擴散金屬匣極1970sNMOS離子佈植多晶矽匣極HongXiao,Ph.D.3www2.austin.cc.tx.us/HongXiao/Book.htm1980’s技術(shù)LCD取代LED作為電子錶和計算機的顯示燈CMOSIC因耗能較低取代NMOSIC最小的圖形尺寸:從3mm縮小到0.8mm晶圓尺寸:100mm(4in)增加到150mm(6in)HongXiao,Ph.D.4www2.austin.cc.tx.us/HongXiao/Book.htm1980’sCMOS技術(shù)LOCOSPSG和再流動蒸鍍機沉積金屬正光阻投影式對準及曝光機電漿蝕刻和濕式蝕刻HongXiao,Ph.D.5www2.austin.cc.tx.us/HongXiao/Book.htmP型基片1980’s技術(shù),晶圓清洗HongXiao,Ph.D.6www2.austin.cc.tx.us/HongXiao/Book.htm襯墊氧化層P型基片成長襯墊氧化層HongXiao,Ph.D.7www2.austin.cc.tx.us/HongXiao/Book.htm襯墊氧化層P型基片氮化矽LPCVD沉積氮化矽HongXiao,Ph.D.8www2.austin.cc.tx.us/HongXiao/Book.htm襯墊氧化層P型基片光阻氮化矽光阻塗佈HongXiao,Ph.D.9www2.austin.cc.tx.us/HongXiao/Book.htm光罩1,矽局部氧化(LOCOS)HongXiao,Ph.D.10www2.austin.cc.tx.us/HongXiao/Book.htmP型基片光阻氮化矽光罩1,矽局部氧化(LOCOS)HongXiao,Ph.D.11www2.austin.cc.tx.us/HongXiao/Book.htmP型基片光阻氮化矽對準和曝光HongXiao,Ph.D.12www2.austin.cc.tx.us/HongXiao/Book.htm氮化矽P型基片光阻顯影HongXiao,Ph.D.13www2.austin.cc.tx.us/HongXiao/Book.htm氮化矽P型基片光阻蝕刻氮化矽HongXiao,Ph.D.14www2.austin.cc.tx.us/HongXiao/Book.htm氮化矽P型基片剝除光阻HongXiao,Ph.D.15www2.austin.cc.tx.us/HongXiao/Book.htm氮化矽P型基片p+p+絕緣佈植HongXiao,Ph.D.16www2.austin.cc.tx.us/HongXiao/Book.htmP型基片氮化矽p+p+SiO2濕式氧化形成LOCOSHongXiao,Ph.D.17www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+SiO2剝除氮化矽及襯墊氧化層，清洗HongXiao,Ph.D.18www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+p+SiO2成長屛蔽氧化層HongXiao,Ph.D.19www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+p+SiO2光阻塗佈HongXiao,Ph.D.20www2.austin.cc.tx.us/HongXiao/Book.htm光罩2,N型井區(qū)HongXiao,Ph.D.21www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+p+SiO2光罩2,N型井區(qū)HongXiao,Ph.D.22www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+p+SiO2曝光HongXiao,Ph.D.23www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+p+SiO2顯影HongXiao,Ph.D.24www2.austin.cc.tx.us/HongXiao/Book.htm磷離子佈植光阻P型基片p+p+p+SiO2N型井區(qū)N型井區(qū)佈植HongXiao,Ph.D.25www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+p+SiO2N型井區(qū)剝除光阻HongXiao,Ph.D.26www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2N型井區(qū)驅(qū)入HongXiao,Ph.D.27www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2剝除屏蔽氧化層HongXiao,Ph.D.28www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2成長犧牲氧化層HongXiao,Ph.D.29www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2剝除犧牲氧化層HongXiao,Ph.D.30www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2成長匣極氧化層HongXiao,Ph.D.31www2.austin.cc.tx.us/HongXiao/Book.htm多晶矽P型基片p+p+N型井區(qū)SiO2匣極氧化層沉積多晶矽HongXiao,Ph.D.32www2.austin.cc.tx.us/HongXiao/Book.htm多晶矽P型基片p+p+N型井區(qū)SiO2光阻塗佈HongXiao,Ph.D.33www2.austin.cc.tx.us/HongXiao/Book.htm光罩3,匣極及連接導(dǎo)線HongXiao,Ph.D.34www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2多晶矽光罩3,匣極及連接導(dǎo)線HongXiao,Ph.D.35www2.austin.cc.tx.us/HongXiao/Book.htm多晶矽P型基片p+p+N型井區(qū)SiO2曝光HongXiao,Ph.D.36www2.austin.cc.tx.us/HongXiao/Book.htm多晶矽P型基片p+p+N型井區(qū)SiO2顯影HongXiao,Ph.D.37www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2光阻多晶矽匣極蝕刻多晶矽HongXiao,Ph.D.38www2.austin.cc.tx.us/HongXiao/Book.htm多晶矽匣極P型基片p+p+N型井區(qū)SiO2剝除光阻HongXiao,Ph.D.39www2.austin.cc.tx.us/HongXiao/Book.htm多晶矽匣極光阻P型基片p+p+N型井區(qū)SiO2光阻塗佈HongXiao,Ph.D.40www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+N型井區(qū)SiO2光罩4,n型源極/汲極HongXiao,Ph.D.41www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+N型井區(qū)SiO2曝光HongXiao,Ph.D.42www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+N型井區(qū)SiO2顯影HongXiao,Ph.D.43www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+N型井區(qū)SiO2P+

佈植n型源極/汲極離子佈植HongXiao,Ph.D.44www2.austin.cc.tx.us/HongXiao/Book.htm光阻P型基片p+p+N型井區(qū)SiO2剝除光阻HongXiao,Ph.D.45www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2光阻塗佈HongXiao,Ph.D.46www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2光罩5,P型源極/汲極曝光HongXiao,Ph.D.47www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2顯影HongXiao,Ph.D.48www2.austin.cc.tx.us/HongXiao/Book.htmB+

佈植P型基片p+p+N型井區(qū)SiO2P型源極/汲極離子佈植HongXiao,Ph.D.49www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2剝除光阻HongXiao,Ph.D.50www2.austin.cc.tx.us/HongXiao/Book.htmp+p+N型井區(qū)P型基片SiO2n+n+p+p+退火HongXiao,Ph.D.51www2.austin.cc.tx.us/HongXiao/Book.htmP型基片p+p+N型井區(qū)SiO2n+n+p+p+LPCVD氮化矽阻擋層HongXiao,Ph.D.52www2.austin.cc.tx.us/HongXiao/Book.htmBPSGP型基片p+p+N型井區(qū)SiO2n+n+p+p+CVD沉積BPSGHongXiao,Ph.D.53www2.austin.cc.tx.us/HongXiao/Book.htmBPSGP型基片p+p+N型井區(qū)SiO2n+n+p+p+BPSG再流動HongXiao,Ph.D.54www2.austin.cc.tx.us/HongXiao/Book.htmBPSGp+p+N型井區(qū)P型基片SiO2n+n+p+p+光阻塗佈HongXiao,Ph.D.55www2.austin.cc.tx.us/HongXiao/Book.htmBPSGp+p+N型井區(qū)P型基片SiO2n+n+p+p+光罩6,接觸窗曝光HongXiao,Ph.D.56www2.austin.cc.tx.us/HongXiao/Book.htmBPSGP型基片p+p+N型井區(qū)SiO2n+n+p+p+顯影HongXiao,Ph.D.57www2.austin.cc.tx.us/HongXiao/Book.htmBPSGP型基片p+p+N型井區(qū)SiO2n+n+p+p+接觸窗蝕刻HongXiao,Ph.D.58www2.austin.cc.tx.us/HongXiao/Book.htmBPSGP型基片p+p+N型井區(qū)n+n+p+p+SiO2剝除光阻HongXiao,Ph.D.59www2.austin.cc.tx.us/HongXiao/Book.htmAl·Cu·SiBPSGp+p+N型井區(qū)P型基片n+n+p+p+SiO2金屬沉積HongXiao,Ph.D.60www2.austin.cc.tx.us/HongXiao/Book.htmAl·Cu·SiBPSGp+p+N型井區(qū)P型基片n+n+p+p+SiO2光阻塗佈HongXiao,Ph.D.61www2.austin.cc.tx.us/HongXiao/Book.htmAl·Cu·SiBPSGP型基片p+p+N型井區(qū)n+n+p+p+SiO2光罩7,金屬連線HongXiao,Ph.D.62www2.austin.cc.tx.us/HongXiao/Book.htmAl·Cu·SiBPSGP型基片p+p+N型井區(qū)n+n+p+p+SiO2顯影HongXiao,Ph.D.63www2.austin.cc.tx.us/HongXiao/Book.htmAl·Cu·SiBPSGP型基片p+p+N型井區(qū)n+n+p+p+SiO2蝕刻金屬HongXiao,Ph.D.64www2.austin.cc.tx.us/HongXiao/Book.htmAl·Cu·SiBPSGP型基片p+p+N型井區(qū)n+n+p+p+SiO2剝除光阻HongXiao,Ph.D.65www2.austin.cc.tx.us/HongXiao/Book.htmUSGAl·Cu·SiBPSGP型基片p+p+N型井區(qū)n+n+p+p+SiO2CVD沉積USGHongXiao,Ph.D.66www2.austin.cc.tx.us/HongXiao/Book.htmUSGAl·Cu·SiBPSG氮化矽P型基片p+p+N型井區(qū)n+n+p+p+SiO2CVD沉積氮化矽HongXiao,Ph.D.67www2.austin.cc.tx.us/HongXiao/Book.htm1990’s技術(shù)驅(qū)動力:數(shù)位邏輯電子的需求PC,通信元件和網(wǎng)際網(wǎng)路.圖形尺寸:從0.8mm到0.18mm晶圓尺寸:從150mm到300mmHongXiao,Ph.D.68www2.austin.cc.tx.us/HongXiao/Book.htm1990’sCMOS技術(shù)磊晶矽淺溝槽絕緣側(cè)壁空間層用來形成低摻雜汲極和金屬矽化合物多晶矽匣極和局部連線降低電阻和改善元件速度鎢金屬矽化物和鈦金屬矽化物HongXiao,Ph.D.69www2.austin.cc.tx.us/HongXiao/Book.htm1990’sCMOS技術(shù)微影技術(shù)G-譜線,I-譜線(365nm),和深紫外線(DUV)248nm正光阻步進機取代投影式對準及曝光工具整合的晶圓軌道機—步進機系統(tǒng)圖案化蝕刻都是電漿蝕刻製程濕式蝕刻用在整面全區(qū)薄膜的剝除HongXiao,Ph.D.70www2.austin.cc.tx.us/HongXiao/Book.htm1990’sCMOS技術(shù)垂直式高溫爐較小的設(shè)置面積和較好的污染物控制.快速加熱製程(RTP)統(tǒng)佈植後退火金屬矽化物的形成

較快、較好的製程以及熱積存控制

直流磁控濺鍍系統(tǒng)取代蒸鍍式系統(tǒng)HongXiao,Ph.D.71www2.austin.cc.tx.us/HongXiao/Book.htm1990’sCMOS技術(shù)多層金屬連線鎢CVD和CMP(或回蝕刻)形成栓塞Ti和TiN作為鎢的阻擋層/附著層Ti當作銅鋁合金的焊接層降低接觸電阻TiN抗反射鍍膜(ARC)HongXiao,Ph.D.72www2.austin.cc.tx.us/HongXiao/Book.htm1990’sCMOS技術(shù)BPSG是很普及的金屬沉積前的介電質(zhì)層(PMD)DCVD:PE-TEOS和O3-TEOSSTI,側(cè)壁空間層,PMD,和IMDDCVD:PE-矽烷PMD阻擋層,介電質(zhì)ARC,和PD氮化矽鎢CMP形成栓塞介電質(zhì)CMP用在平坦化上HongXiao,Ph.D.73www2.austin.cc.tx.us/HongXiao/Book.htm1990’sCMOS技術(shù)群集工具變的非常受歡迎單晶圓製程系統(tǒng)改善晶圓對晶圓的均勻性控制批量系統(tǒng)因為具有較高的生產(chǎn)量所以仍舊用在許多非關(guān)鍵性的製程HongXiao,Ph.D.74www2.austin.cc.tx.us/HongXiao/Book.htm磊晶層沉積P型磊晶層P型晶圓HongXiao,Ph.D.75www2.austin.cc.tx.us/HongXiao/Book.htm光罩1:N型井區(qū)HongXiao,Ph.D.76www2.austin.cc.tx.us/HongXiao/Book.htmN型井區(qū)佈植P型磊晶層P型晶圓光阻N型井區(qū)磷離子HongXiao,Ph.D.77www2.austin.cc.tx.us/HongXiao/Book.htm光罩2:P型井區(qū)HongXiao,Ph.D.78www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)佈植P型磊晶層P型晶圓硼離子P型井區(qū)N型井區(qū)光阻HongXiao,Ph.D.79www2.austin.cc.tx.us/HongXiao/Book.htm剝除光阻,剝除氮化矽/襯墊氧化層P型磊晶層P型晶圓N型井區(qū)P型井區(qū)HongXiao,Ph.D.80www2.austin.cc.tx.us/HongXiao/Book.htm襯墊氧化層,LPCVD沉積氮化矽P型磊晶層P型晶圓N型井區(qū)P型井區(qū)氮化矽HongXiao,Ph.D.81www2.austin.cc.tx.us/HongXiao/Book.htm光罩3:淺溝槽絕緣(STI)HongXiao,Ph.D.82www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻氮化矽,襯墊氧化層和矽P型磊晶層P型晶圓N型井區(qū)P型井區(qū)氮化矽氮化矽HongXiao,Ph.D.83www2.austin.cc.tx.us/HongXiao/Book.htmHDP-CVD沉積USG溝槽填充P型磊晶層P型晶圓N型井區(qū)P型井區(qū)氮化矽氮化矽USGUSGHongXiao,Ph.D.84www2.austin.cc.tx.us/HongXiao/Book.htmCMPUSG,停止於氮化矽層P型磊晶層P型晶圓N型井區(qū)P型井區(qū)NitrideNitrideUSGHongXiao,Ph.D.85www2.austin.cc.tx.us/HongXiao/Book.htm剝除氮化矽和襯墊氧化層，晶圓清洗P型磊晶層P型晶圓N型井區(qū)P型井區(qū)USGSTIHongXiao,Ph.D.86www2.austin.cc.tx.us/HongXiao/Book.htm光罩4:N通道VT

調(diào)整HongXiao,Ph.D.87www2.austin.cc.tx.us/HongXiao/Book.htm光阻磷離子P型磊晶層P型晶圓N型井區(qū)P型井區(qū)USGSTIN通道VT

調(diào)整佈植(磷)HongXiao,Ph.D.88www2.austin.cc.tx.us/HongXiao/Book.htm光罩5:P通道VT

調(diào)整HongXiao,Ph.D.89www2.austin.cc.tx.us/HongXiao/Book.htm光阻硼離子P型磊晶層P型晶圓N型井區(qū)P型井區(qū)STIUSGP通道VT

調(diào)整佈植(硼)HongXiao,Ph.D.90www2.austin.cc.tx.us/HongXiao/Book.htm匣極氧化層,LPCVD沉積多晶矽多晶矽P型磊晶層P型晶圓N型井區(qū)P型井區(qū)STIUSGHongXiao,Ph.D.91www2.austin.cc.tx.us/HongXiao/Book.htm光罩6:匣極和局部連線HongXiao,Ph.D.92www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻多晶矽多晶矽匣極P型磊晶層P型晶圓N型井區(qū)P型井區(qū)STIUSG光阻匣極氧化層HongXiao,Ph.D.93www2.austin.cc.tx.us/HongXiao/Book.htm光罩7:N通道低摻雜汲極(LDD)HongXiao,Ph.D.94www2.austin.cc.tx.us/HongXiao/Book.htmN通道LDD佈植,砷光阻砷離子P型磊晶層P型晶圓N型井區(qū)P型井區(qū)USGSTIHongXiao,Ph.D.95www2.austin.cc.tx.us/HongXiao/Book.htm光罩8:P-通道LDDHongXiao,Ph.D.96www2.austin.cc.tx.us/HongXiao/Book.htmP-通道LDD佈植,BF2+光阻BF2+

離子P型磊晶層P型晶圓N型井區(qū)P型井區(qū)STIUSGHongXiao,Ph.D.97www2.austin.cc.tx.us/HongXiao/Book.htm側(cè)壁空間層匣極氧化層n-

LDDn-

LDD側(cè)壁空間層側(cè)壁空間層多晶矽匣極多晶矽匣極匣極氧化層n-

LDDn-

LDDHongXiao,Ph.D.98www2.austin.cc.tx.us/HongXiao/Book.htm光罩9:N-通道源極/汲極HongXiao,Ph.D.99www2.austin.cc.tx.us/HongXiao/Book.htmN-通道源極/汲極佈值光阻磷離子P型磊晶層P型晶圓N型井區(qū)P型井區(qū)n+n+STIp-p-USGHongXiao,Ph.D.100www2.austin.cc.tx.us/HongXiao/Book.htm光罩9:P-通道源極/汲極HongXiao,Ph.D.101www2.austin.cc.tx.us/HongXiao/Book.htmP-通道源極/汲極佈值光阻硼離子P型磊晶層P型晶圓N型井區(qū)P型井區(qū)n+n+STIp+p+USGHongXiao,Ph.D.102www2.austin.cc.tx.us/HongXiao/Book.htm鉭金屬矽化物製程多晶矽匣極側(cè)壁空間層側(cè)壁空間層匣極氧化層n-n-n+n+Ar+Ar+Ti多晶矽匣極匣極氧化層n-n-n+n+TiSi2TiSi2Ti多晶矽匣極匣極氧化層n-n-n+n+TiSi2TiSi2多晶矽匣極匣極氧化層n-n-n+n+HongXiao,Ph.D.103www2.austin.cc.tx.us/HongXiao/Book.htm鈦金屬沉積RTP矽化物合金剝除未反應(yīng)的鈦矽矽矽STI側(cè)壁空間層鈦鈦金屬矽化物多晶矽匣極氧化層鈦自我對準金屬矽化物製程HongXiao,Ph.D.104www2.austin.cc.tx.us/HongXiao/Book.htm硼磷矽玻璃(BPSG)沉積和再流動n+n+p+p+STIUSGBPSGn+n+p+p+STIUSGBPSGHongXiao,Ph.D.105www2.austin.cc.tx.us/HongXiao/Book.htm光罩10:接觸窗孔HongXiao,Ph.D.106www2.austin.cc.tx.us/HongXiao/Book.htm接觸窗孔蝕刻,BPSG蝕刻P型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGHongXiao,Ph.D.107www2.austin.cc.tx.us/HongXiao/Book.htm接觸窗孔蝕刻,BPSG蝕刻P型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSG鎢鈦/氮化鈦HongXiao,Ph.D.108www2.austin.cc.tx.us/HongXiao/Book.htm接觸窗孔蝕刻,BPSG蝕刻P型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSG鈦/氮化鈦鋁銅合金鈦TiNARCWHongXiao,Ph.D.109www2.austin.cc.tx.us/HongXiao/Book.htm光罩11:金屬1連線HongXiao,Ph.D.110www2.austin.cc.tx.us/HongXiao/Book.htm金屬蝕刻P型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSG鈦/氮化鈦鈦TiNARCW鋁銅合金HongXiao,Ph.D.111www2.austin.cc.tx.us/HongXiao/Book.htmPE-TEOSUSG沉積/蝕刻/沉積/CMPP型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGW鋁銅合金USG沉積/蝕刻/沉積/CMPIMD1HongXiao,Ph.D.112www2.austin.cc.tx.us/HongXiao/Book.htm光罩12:金屬接觸窗1HongXiao,Ph.D.113www2.austin.cc.tx.us/HongXiao/Book.htm金屬接觸窗孔1蝕刻,蝕刻USGP型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGW鋁銅合金USGIMD1HongXiao,Ph.D.114www2.austin.cc.tx.us/HongXiao/Book.htm金屬接觸窗孔1蝕刻,蝕刻USGP型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGW鋁銅合金USG金屬2鋁銅合金M1IMD1HongXiao,Ph.D.115www2.austin.cc.tx.us/HongXiao/Book.htm光罩13:金屬2連線HongXiao,Ph.D.116www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻金屬2P型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGW鋁銅合金USGM1M2鋁?銅IMD1HongXiao,Ph.D.117www2.austin.cc.tx.us/HongXiao/Book.htmUSG沉積/蝕刻/沉積/CMPP型磊晶層P型晶圓N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGW鋁銅合金USGM1M2鋁?銅USGIMD1IMD2HongXiao,Ph.D.118www2.austin.cc.tx.us/HongXiao/Book.htm光罩14:金屬接觸窗2HongXiao,Ph.D.119www2.austin.cc.tx.us/HongXiao/Book.htm金屬接觸窗孔2蝕刻,蝕刻USGN-WellP-WellBPSGn+n+p+p+STIUSGW鋁銅合金USGM1M2鋁?銅USGIMD1IMD2HongXiao,Ph.D.120www2.austin.cc.tx.us/HongXiao/Book.htm金屬3的金屬化N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGW鋁銅合金USGM1M2鋁?銅USG金屬3鋁銅合金WIMD1IMD2HongXiao,Ph.D.121www2.austin.cc.tx.us/HongXiao/Book.htm光罩15:金屬3連線HongXiao,Ph.D.122www2.austin.cc.tx.us/HongXiao/Book.htm金屬蝕刻,光阻剝除和金屬退火N型井區(qū)P型井區(qū)BPSGp+p+STIUSGW鋁銅合金USGM1M2鋁?銅USG金屬3鋁銅合金WIMD1IMD2n+n+HongXiao,Ph.D.123www2.austin.cc.tx.us/HongXiao/Book.htmPE-TEOSUSG沉積/蝕刻/沉積/CMP鋁銅合金USGM1M2鋁?銅USG金屬3鋁銅合金WUSGIMD1IMD2IMD3HongXiao,Ph.D.124www2.austin.cc.tx.us/HongXiao/Book.htm光罩16:金屬接觸窗3HongXiao,Ph.D.125www2.austin.cc.tx.us/HongXiao/Book.htm金屬接觸窗孔3蝕刻和光阻剝除鋁銅合金USGM1M2鋁?銅USG金屬3鋁銅合金WIMD1IMD2IMD3USGHongXiao,Ph.D.126www2.austin.cc.tx.us/HongXiao/Book.htm金屬4沉積鋁銅合金USGM1M2鋁?銅USG金屬3鋁銅合金WIMD1IMD2IMD3USG金屬4鋁?銅HongXiao,Ph.D.127www2.austin.cc.tx.us/HongXiao/Book.htm光罩17:金屬4連線HongXiao,Ph.D.128www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻金屬4金屬3鋁銅合金IMD3USG金屬4鋁?銅鋁銅合金HongXiao,Ph.D.129www2.austin.cc.tx.us/HongXiao/Book.htm鈍化介電質(zhì)沉積金屬3鋁銅合金IMD3USG金屬4鋁?銅USG鋁銅合金氮化矽HongXiao,Ph.D.130www2.austin.cc.tx.us/HongXiao/Book.htm光罩18:接合墊區(qū)HongXiao,Ph.D.131www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻接合墊區(qū),剝除光阻金屬3鋁銅合金IMD3USG金屬4鋁?銅USG氮化矽鋁銅合金HongXiao,Ph.D.132www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型晶圓金屬3鋁?銅

合金IMD3USG金屬4鋁?銅USG氮化矽鋁?銅

合金N型井區(qū)P型井區(qū)BPSGn+n+p+p+STIUSGW鋁?銅

合金USGM1M2鋁?銅USGWIMD1IMD2TiSi2多晶矽TiTiNARCWTi/TiNTi/TiN側(cè)壁空間層,USGPMD阻擋層,氮化矽

IMD3鈍化層1鈍化層2PMDCMOS截面HongXiao,Ph.D.133www2.austin.cc.tx.us/HongXiao/Book.htm尖端先進的技術(shù)2000年的技術(shù)圖形尺寸0.13mm或更小晶圓尺寸200mm或300mmHongXiao,Ph.D.134www2.austin.cc.tx.us/HongXiao/Book.htm尖端先進的技術(shù)矽覆蓋絕緣技術(shù)(SOI)和淺溝槽絕緣技術(shù)STI完全隔離矽基片上相鄰的電子元件防止元件間輻射感應(yīng)的軟性誤差(softerror)增加IC晶片電晶體的密度.高輻射阻抗力應(yīng)用矽覆蓋絕緣技術(shù)的晶片將成為高效能電子儀器的主流HongXiao,Ph.D.135www2.austin.cc.tx.us/HongXiao/Book.htm尖端先進的技術(shù)銅和低-k

降低電阻電容(RC)延滯低功率消耗，高速IC雙重金屬鑲嵌製程兩個介電質(zhì)蝕刻製程，沒有金屬蝕刻使用金屬CMP取代金屬蝕刻主要挑戰(zhàn)：介電質(zhì)蝕刻，金屬沉積和金屬研磨HongXiao,Ph.D.136www2.austin.cc.tx.us/HongXiao/Book.htm尖端先進的技術(shù)銅金屬化:銅種晶層,Ta/TaN

阻擋層,CuECP,退火和金屬CMP低-k

介電質(zhì):然在研發(fā)中CVD和自旋塗佈介電質(zhì)(SOD).CVD:純熟的技術(shù)，既有的設(shè)備製程和經(jīng)驗SOD:能把多孔二氧化矽的介電係數(shù)延伸到非常低的數(shù)值(k<2)HongXiao,Ph.D.137www2.austin.cc.tx.us/HongXiao/Book.htm尖端先進的技術(shù)矽覆蓋絕緣技術(shù)CMOSIC使用銅與低-k

連線P-型井區(qū)P-型晶圓深埋SiO2USGN-型井區(qū)STIUSGn+n+p+p+PSG鎢鎢SODSODCu1銅1Cu1銅1Cu1銅1Cu1銅1SODSOD銅2SODSOD銅3銅3SOD銅4SODSOD銅5PSG氮化矽鉛錫合金-SODHongXiao,Ph.D.138www2.austin.cc.tx.us/HongXiao/Book.htm裸晶圓P型晶圓HongXiao,Ph.D.139www2.austin.cc.tx.us/HongXiao/Book.htm高電流氧離子佈植P型晶圓氧離子,O+HongXiao,Ph.D.140www2.austin.cc.tx.us/HongXiao/Book.htm氧化退火P型晶圓深埋SiO2

層HongXiao,Ph.D.141www2.austin.cc.tx.us/HongXiao/Book.htm晶圓清洗P型晶圓深埋SiO2

層HongXiao,Ph.D.142www2.austin.cc.tx.us/HongXiao/Book.htm磊晶矽沉積P型晶圓深埋SiO2

層P型磊晶層HongXiao,Ph.D.143www2.austin.cc.tx.us/HongXiao/Book.htm晶圓清洗P型晶圓深埋SiO2

層P型磊晶層HongXiao,Ph.D.144www2.austin.cc.tx.us/HongXiao/Book.htm氧化,屏蔽氧化層P型晶圓深埋SiO2

層P型磊晶層HongXiao,Ph.D.145www2.austin.cc.tx.us/HongXiao/Book.htm光阻塗佈與烘烤P型晶圓深埋SiO2

層P型磊晶層光阻HongXiao,Ph.D.146www2.austin.cc.tx.us/HongXiao/Book.htm光罩0,對準光罩P型晶圓深埋SiO2

層P型磊晶層光阻HongXiao,Ph.D.147www2.austin.cc.tx.us/HongXiao/Book.htm曝光P型晶圓深埋SiO2

層P型磊晶層光阻HongXiao,Ph.D.148www2.austin.cc.tx.us/HongXiao/Book.htm曝光後烘烤(PEB),顯影,和檢視P型晶圓深埋SiO2

層P型磊晶層光阻HongXiao,Ph.D.149www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻氧化層,蝕刻矽P型晶圓深埋SiO2

層P型磊晶層光阻HongXiao,Ph.D.150www2.austin.cc.tx.us/HongXiao/Book.htm剝除光阻P型晶圓深埋SiO2

層P型磊晶層HongXiao,Ph.D.151www2.austin.cc.tx.us/HongXiao/Book.htm剝除屏蔽氧化層P型晶圓深埋SiO2

層P型磊晶層HongXiao,Ph.D.152www2.austin.cc.tx.us/HongXiao/Book.htm晶圓清洗P型晶圓深埋SiO2

層P型磊晶層HongXiao,Ph.D.153www2.austin.cc.tx.us/HongXiao/Book.htm氧化,襯墊氧化層P型晶圓深埋SiO2

層P型磊晶層HongXiao,Ph.D.154www2.austin.cc.tx.us/HongXiao/Book.htmLPCVD氮化矽P型晶圓深埋SiO2

層P型磊晶層氮化矽

HongXiao,Ph.D.155www2.austin.cc.tx.us/HongXiao/Book.htm光阻塗佈與烘烤P型晶圓深埋SiO2

層P型磊晶層光阻氮化矽HongXiao,Ph.D.156www2.austin.cc.tx.us/HongXiao/Book.htm光罩1:淺溝槽絕緣(STI)HongXiao,Ph.D.157www2.austin.cc.tx.us/HongXiao/Book.htm對準和曝光P型晶圓深埋SiO2

層P型磊晶層光阻氮化矽

HongXiao,Ph.D.158www2.austin.cc.tx.us/HongXiao/Book.htm曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層P型磊晶層光阻氮化矽HongXiao,Ph.D.159www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻氮化矽和襯墊氧化層P型晶圓深埋SiO2

層P型磊晶層光阻氮化矽

HongXiao,Ph.D.160www2.austin.cc.tx.us/HongXiao/Book.htm剝除光阻P型晶圓深埋SiO2

層P型磊晶層氮化矽

HongXiao,Ph.D.161www2.austin.cc.tx.us/HongXiao/Book.htm蝕刻矽P型晶圓深埋SiO2

層P型磊晶層氮化矽

P型磊晶層HongXiao,Ph.D.162www2.austin.cc.tx.us/HongXiao/Book.htm晶圓清洗P型晶圓深埋SiO2

層P型磊晶層氮化矽

P型磊晶層HongXiao,Ph.D.163www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層氧化,阻擋氧化層P型晶圓深埋SiO2

層氮化矽

HongXiao,Ph.D.164www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層高密度電漿化學(xué)氣相沉積未摻雜玻璃(HDPCVDUSG)P型晶圓深埋SiO2

層氮化矽

USGUSGHongXiao,Ph.D.165www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層化學(xué)機械研磨(CMP)USGP型晶圓深埋SiO2

層氮化矽

USGUSGHongXiao,Ph.D.166www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層剝除氮化矽P型晶圓深埋SiO2

層USGUSGHongXiao,Ph.D.167www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層剝除襯墊氧化層P型晶圓深埋SiO2

層USGUSGSTIHongXiao,Ph.D.168www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層晶圓清洗P型晶圓深埋SiO2

層USGUSGSTIHongXiao,Ph.D.169www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層氧化,犧牲氧化層P型晶圓深埋SiO2

層USGUSGSTIHongXiao,Ph.D.170www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層光阻塗佈與烘烤P型晶圓深埋SiO2

層USGUSGSTI光阻HongXiao,Ph.D.171www2.austin.cc.tx.us/HongXiao/Book.htm光罩2:N-型井區(qū)HongXiao,Ph.D.172www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層對準和曝光P型晶圓深埋SiO2

層USGUSGSTI光阻HongXiao,Ph.D.173www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層P型磊晶層曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGUSGSTI光阻HongXiao,Ph.D.174www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層N-型井區(qū)佈植P型晶圓深埋SiO2

層USGUSGSTI光阻N型井區(qū)磷離子,P+HongXiao,Ph.D.175www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層PMOSVT

調(diào)整佈植P型晶圓深埋SiO2

層USGUSGSTI光阻N型井區(qū)硼離子,B+HongXiao,Ph.D.176www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層剝除光阻P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.177www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層光阻塗佈與烘烤P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻HongXiao,Ph.D.178www2.austin.cc.tx.us/HongXiao/Book.htm光罩3:P型井區(qū)HongXiao,Ph.D.179www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層對準和曝光P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻HongXiao,Ph.D.180www2.austin.cc.tx.us/HongXiao/Book.htmP型磊晶層曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻HongXiao,Ph.D.181www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)P-型井區(qū)佈植P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻硼離子,B+HongXiao,Ph.D.182www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)NMOSVT

調(diào)整佈植P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻磷離子,P+HongXiao,Ph.D.183www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除光阻P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.184www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除犧牲氧化層P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.185www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)晶圓清洗P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.186www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)匣極氧化層P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.187www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)LPCVD沉積非晶矽P型晶圓深埋SiO2

層USGSTIN型井區(qū)非晶矽匣極氧化層USGHongXiao,Ph.D.188www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)光阻塗佈與烘烤P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)非晶矽光阻HongXiao,Ph.D.189www2.austin.cc.tx.us/HongXiao/Book.htm光罩4,匣極和局部連線HongXiao,Ph.D.190www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)對準和曝光P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)非晶矽光阻HongXiao,Ph.D.191www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)非晶矽光阻HongXiao,Ph.D.192www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)非晶矽蝕刻P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)非晶矽光阻匣極氧化層HongXiao,Ph.D.193www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除光阻P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)非晶矽HongXiao,Ph.D.194www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)晶圓清洗P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)非晶矽HongXiao,Ph.D.195www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)多晶矽退火和氧化P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)多晶矽HongXiao,Ph.D.196www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)光阻塗佈與烘烤P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻多晶矽HongXiao,Ph.D.197www2.austin.cc.tx.us/HongXiao/Book.htm光罩5,NMOSLDD佈植HongXiao,Ph.D.198www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)對準和曝光P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)多晶矽光阻HongXiao,Ph.D.199www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻HongXiao,Ph.D.200www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)NMOSLDD佈植P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻銻離子,Sb+HongXiao,Ph.D.201www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除光阻P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.202www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)光阻塗佈與烘烤P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)多晶矽光阻HongXiao,Ph.D.203www2.austin.cc.tx.us/HongXiao/Book.htm光罩6:PMOSLDD佈植HongXiao,Ph.D.204www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)對準和曝光P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)多晶矽光阻HongXiao,Ph.D.205www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)多晶矽光阻HongXiao,Ph.D.206www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)PMOSLDD佈植P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)多晶矽光阻氟化硼離子,BF2+HongXiao,Ph.D.207www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除光阻P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.208www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)CVD沉積USG,CVD沉積氮化矽P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)HongXiao,Ph.D.209www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)氮化矽和USG回蝕刻(Etchback)P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)側(cè)壁空間層多晶矽匣極HongXiao,Ph.D.210www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)光阻塗佈與烘烤P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻HongXiao,Ph.D.211www2.austin.cc.tx.us/HongXiao/Book.htm光罩7,NMOSS/D佈植HongXiao,Ph.D.212www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)對準和曝光P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻HongXiao,Ph.D.213www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGUSGSTIN型井區(qū)光阻HongXiao,Ph.D.214www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)NMOSS/D佈植P型晶圓深埋SiO2

層USGN型井區(qū)光阻STIUSG砷離子,As+HongXiao,Ph.D.215www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除光阻P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+HongXiao,Ph.D.216www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)光阻塗佈與烘烤P型晶圓深埋SiO2

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層USGN型井區(qū)STIUSGn+n+光阻HongXiao,Ph.D.219www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+光阻HongXiao,Ph.D.220www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)PMOSS/D佈植P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+光阻硼離子,B+HongXiao,Ph.D.221www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除光阻P型晶圓深埋SiO2

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層USGN型井區(qū)STIUSGn+n+p+p+HongXiao,Ph.D.223www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)氬離子濺射蝕刻P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+HongXiao,Ph.D.224www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)鈷和氮化鈦

濺鍍沉積P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+鈷氮化鈦HongXiao,Ph.D.225www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)快速加熱退火P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+鈷矽化物(CoSi2)鈷氮化鈦HongXiao,Ph.D.226www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)剝除氮化鈦和鈷P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+鈷矽化物(CoSi2)HongXiao,Ph.D.227www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)PECVD沉積氮化矽P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+鈷矽化物(CoSi2)HongXiao,Ph.D.228www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)HDPCVD沉積摻磷矽玻璃(PSG)P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+PSGHongXiao,Ph.D.229www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)CMP摻磷矽玻璃(PSG)P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+PSGHongXiao,Ph.D.230www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)光阻塗佈與烘烤P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+PSG光阻HongXiao,Ph.D.231www2.austin.cc.tx.us/HongXiao/Book.htm光罩9,接觸窗及局部連線HongXiao,Ph.D.232www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)對準和曝光P型晶圓深埋SiO2

層USGN型井區(qū)STIUSGn+n+p+p+PSG光阻HongXiao,Ph.D.233www2.austin.cc.tx.us/HongXiao/Book.htmP型井區(qū)曝光後烘烤,顯影和檢視P型晶圓深埋SiO2

層USGN型井區(qū)STIUSG