GBT-ITO Targets-ITO實現(xiàn)目標(biāo)國家標(biāo)準(zhǔn)

GB/T20510—XXXX

ICS77.150.60

CCSH62

NationalStandardofthePeople’sRepublicofChina

GB/T20510-XXX

ReplacingGB/T20510-2017

IndiumTinOxideTargets

(Pre-reviewDraft)

Issuedby××××-××

Implementedby××

StandardizationAdministration

StateAdministrationforMarketRegulation

Issue

GB/TXXXX—XXXX

PAGE\*Arabic

11

GB/TXXXX—XXXX

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2

Preface

ThisdocumentisdraftedasperGB/T1.1-2020Directivesforstandardization—Part1:Rulesforthestructureanddraftingofstandardizingdocuments.

GB/T20510-2017IndiumTinOxideTargetsisreplacedbythisDocument.ComparedwithGB/T20510-2017,mainchangestechnicallyareasfollows.

ApplicationscopeischangedfromItisfortheindiumtinoxidetargets,consistingofIn2O3andSnO2=90:10wt.%toItisfortheindiumtinoxidetargetsconsistingofIn2O3andSnO2undercertainratio.

ThetermofKelvinBridgeisdeleted.(SeeChapter1inVersion2017).

ReferredStandardizedDocumentsisadded.(See5.2whileChapter2inVersion2017)

Contentofdensityisadded.(See3.2while3.2inVersion2017)

ClassificationmethodischangedfromasperdensitytoaspertheratioandnumbersofIndiumoxideandtinoxide.(See5.1.1while4.21.inVersion2017)

Requirementsformainchemicalcomponentarechanged.(See4.1inVersion2017)

Requirementsforphysicalpropertiesarechanged.(See5.3,while4.4inVersion2017)

Contentsofphysicalspecificationischanged.(See5.3while4.4inVersion2017)

SurfaceQualityischangedtoAppearanceQuality.(See5.4while4.5inVersion2017)

InternalQualityisadded.(See5.5)

Analyticalmethodsforchemicalcomponentsarechanged.(See6.1while5.1inVersion2017)

Inspectionitemsarechanged.(See6.3while5.3inVersion2017)

SomecontentsofthisDocumentmayberelatedtopatents.TheauthoritythatissuesthisDocumentshallnottakeonresponsibilityofpatents.

ItisproposedbytheChinaNon-FerrousMetalsIndustryAssociation.

ItisfiledbytheNationalNon-FerrousMetalsStandardizationTechnicalCommittees(SAC/TC243).

ItisdraftedmainlybyVitalThinFilmMaterials(Guangdong)LimitedCompany,ZhuzhouSmelterGroupCo.Ltd.,GuangxiCrystalUnionPhotoelectricMaterialsCo.,Ltd.,ShenzhenNonfemetCompany,ZhuzhouTorchAntaiNewMaterialsCo.,Ltd.,WuhuYingriTechnologyLimitedCompany,CNBM(Chengdu)OptoelectronicMaterialsCo.,LTD.,OMATAdvancedMaterialsCompany,HebeiHengboNewMaterialsTechnologyCo.Ltd.,FujianAcetronNewMaterialsCo.,Ltd,ZhongshanZLAdvancedMaterialsTechnology,ShanghaiUniversity,VitalMaterials.

Draftersareasfollows:

Historyrecordsofthisdocumentandthereplacedversionareasfollows:

Thefirstversionwasissuedin2006asGB/T20510-2006IndiumTinOxideTargets

Thefirstrevisedversionwasissuedin2017.

Thisisthesecondrevisedversion.

IndiumTinOxideTargets

1Scope

Thisdocumentstipulatesthetechnicalrequirements,testingmethods,rulesofinspection,logoandtags,packaging,transportation,storage,attachments,andorders.

Itisfortheindiumtinoxidetargets(abbreviatedtoITOhereinafter)consistingofIn2O3andSnO2undercertainratio,whichareappliedfortransparentconductivethinfilmasacorematerial.

2ReferredStandardizedDocuments

ThecontentsofthefollowingdocumentsconstitutethenecessaryprovisionsofthisDocumentbystandardizedquotations,wherethequoteddocumentswithdatesareapplicableforthisDocumentwhilethelatestversionsofthosewithoutdates,includingalltherevisedlists,areapplicableforthisDocument.

GB/T1551Testmethodformeasuringresistivityofmonocrystallinesilicon-In-linefour-pointprobeanddirectcurrenttwo-pointprobemethod

GB/T5163Sinteredmetalmaterials，excludinghardmetals-Permeablesinteredmetalmaterials-Determinationofdensity，oilcontent，andopenporosity

GB/T13298InspectionMethodofMicrostructureforMetals

GB/T16535Fineceramics(advancedceramics,advancedtechnicalceramics).Testmethodforlinearthermalexpansionofmonolithicceramicsbypush-rodtechnique

GB/T6569Fineceramics(advancedceramics,advancedtechnicalceramics)-Testmethodforflexuralstrengthofmonolithicceramicsatroomtemperature

SL499Standardtestmethodfordeterminingresidualstressesbythehole-drillingstraingagemethod

GB/T8170Rulesofroundingofffornumericalvalues&expressionandjudgementoflimitingvalues

3Terms&Definitions

ThetermsandtheirdefinitionsasfollowsareappliedinthisDocument.

3.1Bulkdensity

Materials’weightpervolume.

3.2Relativedensity

Theratioofthebulkdensityandtheoreticaldensity

Table1Theoreticaldensityofallnumbers

Number

Theoreticaldensity

ITO90

7.155

ITO93

7.163

ITO95

7.167

ITO97

7.172

ITO98

7.174

ITO99

7.177

4Types

ITOtargetshavetwotypes,namelyplanertargetsandrotatabletargets.TherearesixnumbersaspertheratioofIn2O3andSnO2,namelyITO90,ITO93,ITO95,ITO97,ITO98,ITO99.

5TechnicalRequirements

5.1ChemicalComponent

5.1.1ThemainchemicalcomponentshouldbeinlinewithTable2

Table2Themainchemicalcomponent

Number

（In2O3:SnO2）wt.%

ToleranceofTinoxide（%）

ITO90

90:10

±0.5

ITO93

93:7

±0.4

ITO95

95:5

±0.3

ITO97

97:3

±0.3

ITO98

98:2

±0.2

ITO99

99:1

±0.1

5.1.2Impurities

ITO’simpuritiesshouldbeuptothefollowingspecification.

Table3ITO’sImpurities

ContentofImpurities≤（×10-4）%

Fe

Al

Si

Cu

Pb

Cd

Ni

Cr

Tl

Fe

15

10

15

5

5

5

5

5

5

15

Thereisnorequirementforpurity,soherethereisnorulesfortotalimpurities.

5.1.3Others

BoththesupplierandthecustomershallnegotiateanddecideitwitheachotherwhenthereareotherspecialrequirementsforITO’sweightpercentageorimpurities..

5.2PhysicalProperties

5.2.1ITO’sphysicalpropertiesshouldbeinlinewithTable4

Table4ITO’sphysicalproperties

Number

Relativedensity（%）

(≥)

Resistivity（×10-4Ω·cm）(≤)

Linearexpansion（℃-1）（≤）

Flexurestrength（MPa）（≥）

Residualstress（MPa）（<）

Averagegrainsize（μm）（≤）

ITO90

99.6

1.6

9

150

10

10

ITO93

98.7

1.7

9

100

10

10

ITO95

98.6

1.8

9

80

20

20

ITO97

98.6

1.9

9

100

30

30

ITO98

98.0

3.0

9

80

30

30

ITO99

98.0

16

9

80

30

40

5.2.2BoththesupplierandthecustomershallnegotiateanddecideitwhenthereareotherrequirementsforITO‘sphysicalproperties.

5.3Physicalspecification

ITOhastwotypes,namelyplanertargetsandrotatabletargets.Boththesupplierandthecustomershallnegotiateanddecidethespecificationandtolerance.

5.4AppearanceQuality

5.4.1SurfaceroughnessofITO≤1.0μm.

5.4.2ITOshouldbegreyish-greenorashblackwithuniformcolor.

5.4.3ITOshouldbeflat,cleanandsmoothonthesurfacewithoutchipping,fingerprints,foreignmattersorcontamination.

5.4.4Porosity’sdiameterofITOisnomorethan0.3mmandnumberofporositypervolume≤5∕cm2.

5.5Product’sInternalQuality

Thereshouldbenocracksinternally.

6TestingMethods

6.1ChemicalComponentAnalysis

Itiscarriedoutbasedonthedecisionthatthesupplierandthecustomernegotiateitandmake.

6.2PhysicalProperties

6.2.1Relativedensity

ThebulkdensityiscarriedoutviaGB/T5163,andthentherelativedensityiscalculatedaccordingtothebulkdensityandtheoreticaldensity.

6.2.2Testingmethodsforresistivity

ItiscarriedoutviaGB/T1551.

6.2.3Linerexpansibility

ItiscarriedoutviaGB/T16535.

6.2.4Testingmethodsforflexuralstrength

ItiscarriedoutviaAGB/T6569.

6.2.5Testingmethodsforresidualstresses

ItiscarriedoutviaSL499.

6.2.6AverageGrainSize

ItiscarriedoutviaGB/T13298.

6.3PhysicalSpecification

ThephysicalspecificationofITOisdeterminedbycorrespondingprecisionmeasuringdevices.

6.4AppearanceQuality

Itisinspectedvisuallyorbyaroughnesstester.

6.5Product’sInternalQuality

Itistestedwithultrasonicequipmenttocheckoutdamages.

7InspectionRules

7.1Inspection&Acceptance

7.1.1ITOshouldbeinspectedbythesupplier’squalityantechnicalsupervisiondepartmenttoguaranteetheproductsareinlinewiththeDocumentororders.

7.1.2ThecostumershouldcheckouttheproductsreceivedaccordingtotheDocument.Thecostumershouldinformthesupplierin30daysuponthereceivingdateiftheinspectionresultisnotinlinewiththeDocumentortheorders(contracts).Boththetwopartiesshallnegotiateitwitheachotherandsolveit.Boththetwopartiesshalltakesamplestogetherwheneverthereisadisputeagainsttheinspectionresultsandthethirdauthoritypartyisinvolved.

7.2Batching

ITOinspectionsshouldbesentinbatcheswhichareconsistedofthesamemanufacturingprocessandthesamebatchofITOpowder.

7.3InspectionItems

InspectionitemsandsamplingshouldbeinlinewiththeregulationsonTable5.

Table5Inspectionitems,frequencyofsamplingandmethodsofsampling

Inspectionitem

Frequencyofsampling

methodsofsampling

Itemrequired

Itemofinspectionmethods

Chemicalcomponent

Eachbatch

NegotiatedanddecidedbythebothParties

5.1

6.1

Relativedensity

Eachbatch

Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,take3-4samplesof20mm*20mmwithalinearcuttingmachine,cuttingsamplesisometrically;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofbulkdensity.

5.2.1

6.2.1

Resistivity

Eachbatch

Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,take10rectanglesamplesof120mmlongwithalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofresistivity.

5.2.1

6.2.2

Linerexpansibility

Quarterlyinspection

Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,take5rectanglesampleswiththesamesizebyalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationoflinearexpansivity.

5.2.1

6.2.3

Flexuralstrength

Quarterlyinspection

Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,takesamplesrequiredwithalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofflexuralstrength.

5.2.1

6.2.4

Residualstrength

Quarterlyinspection

Firstly,take10%ofsamplesrandomlyfromtheproductsbypieces,butatleastfromonepiece;secondly,takesamplesrequiredwithalinearcuttingmachine,cuttingtheedges;thirdly,cleanthemwithanultrasoniccleaningmachineforthedeterminationofresidualstrength.

5.2.1

6.2.5

Averagegrainsize

Quarterlyinspection

cleanthesamplesthataredonewiththedensityinspection,anddrythemwithtissuetoinspect

5.2.1

6.2.6

Physicalspecification

Eachpiece

Eachpiece

5.3

6.3

Appearancequality

Eachpiece

Eachpiece

5.4

6.4

Internalquality

Eachbatch

cleanthesamplesthataredonewiththedensityinspection,anddrythemwithtissuetoinspect

5.5

6.5

7.4DeterminationofInspectionResults

7.4.1ItiscarriedoutbyGB/T8170fortheroundingoffforvaluesoftheinspectionresultsandtodeterminethevaluesafterroundedoff.

7.4.2Thisproductisunqualifiediftheresultsofthechemicalcomponent,physicalproperties,internalqualityarenotinlinewiththeDocument.

7.4.3ThisproductisunqualifiedifthephysicalspecificationandappearancequalityarenotinlinewiththeDocument.

8Logo&Tags,Packaging,Transportation,Storage&Attachments

8.1Logo&Tags

EachpieceofITOshouldshowthefollowing:

productname;

productnumber;

specificationandsize;

netweight;

productiondate;

companyname.

8.2Packaging

EachpieceofITOshouldbevacuumedpackagedunderthecleancircumstanceandanti-vibrationshouldbeimplemented.

8.3Transportation&Storage

ITOshouldbestoredinacoolanddrypl